Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

Secondary Batteries

(A) 4 (B) 2 C *Specifications and dimensions for the 90-series are the same as standard products.

100

Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

20

(With nozzle removed) C (dm3/sbar): 6.0, b: 0.25 (Effective area: 0.047 inch2 (30 mm2)) 600 mm Port size Rc, NPT, G 1/4, 3/8 Note) Part number for set of extension nozzle and fitting.

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

0.4

B A C B A C B A C B A C B A C B A C B A C kit 34.3 47.1 67.9 94.1 (Single) 98.6 (Double, Dual 3 port valve) 107.6 (3 position) P kit 35 5.5 28.1 12.7 J kit T Triangle mark indicator position EXH outlet 2 x M4 DIN rail clamp screw 49.4 9 kit Release for switching connector direction Applicable connector: Flat ribbon cable connector (26P) (Conforming to MIL-C-83503) U side Stations D side n

SYJ300/500/700

Flow Characteristics Series Flow characteristics C [dm3/(sbar)] b Cv 0.089 0.32 0.72 0.31 0.41 0.38 0.36 1.2 2.7 SYJ300 SYJ500 SYJ700 Cover (stainless steel) 4-4-1 2 3 Port Solenoid Valve Rubber Seal Series SYJ300/500/700 Series Variations Option Series Port size Sonic conductance C [dm3/(sbar)] Manual override Type of actuation Voltage Electrical entry With light/surge voltage suppressor

Large Size Vacuum Module: Series ZR

Model ZR1-FX-0.1 to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Bracket C (ZR1-OBC) Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Standard ZA ZX ZR How to Order ZM ZR1 FX ZMA Bracket C ZQ Filter case Nil With Bracket C Without Bracket C Caution N ZH 1. The case is made of polycarbonate.

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CV/MVGQ

J G5-S CV MVGQ Connection port A CC RB S + Stroke LS + Stroke ZZ + Stroke ZZ + l + Stroke h + l J Stroke range DBore size (mm) A AL B B1 C D E F H1 K LT J LD LH LS LX MM LZ (mm) 40 50 63 80 100 Up to 500 501 to 800 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 16 20 20 25 30 32 40 40 52 52 10 10

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

C95Series

D-A44 Conduit , _;-c' I>-F5CJ51!:1 Grommet D-F5i!

ITV

/C or less Operating temperature range 0 to 50C (No condensation) Equivalent to IP65 VEX Enclosure Connection type Built-in One-touch fittings SRH z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size SRP z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size Weight Note 1) SRF 100 g or less (without option) Note 1) Indicates the weight of a single unit

Valve Single Unit

Note 2) The withstand voltage specification for the wiring unit section is JIS C 0704, Grade 1 or its equivalent.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

HRX-OM-W002

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Base Mounted Metal Seal/Rubber Seal Series VQ

Locking type (Manual) N.O N.O 2 VQ0 4 position dual 3 port valve (C) 2 position double Yes None Nil E Note) 4 2 C Note) 1 5 3 VQ4 D-sub connector AXT100-DS25-030 Cylinder ports C8: With One-touch fitting for 8 N.C N.O Rubber seal type only.