Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

IR1000/2000/3000

August, 1998 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Mounting: B (w/Bracket), Float Type Auto Drain: None, Pressure Gauge: G (Round Pressure Gauge), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Unit

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Mounting: B (w/Bracket), Float Type Auto Drain: None, Pressure Gauge: None, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Unit on Product Label:

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: 2 (Metal Bowl), Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: None, Pressure Gauge: None, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Unit on Product

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: None, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Unit on Product Label:

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: None, Pressure Gauge: G (Round Pressure Gauge), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: 2 (Metal Bowl), Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None,

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Drain Guide 1/8, 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Mounting: None, Float Type Auto Drain: D (N.O.

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Drain Guide 1/8, 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: B (w/Bracket), Float Type Auto Drain: None, Pressure Gauge: None, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Unit on Product Label:

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: None, Float Type Auto Drain: None, Pressure Gauge: None, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: None, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Unit on Product Label: psi, °F