A

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D



(Full span) 0.05 to 0.7 MPa Rc AF Mounting Linearity (3) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Signal pressure (3) IR 1 8 Signal port PA (3) 02 03 02 04 04 06 10 10 12 14 20 01 Port P A R M5 01 M5 01 01 02 VEX Port size Rc (4) (4) 1 2 1 1 1 4 1 1 8 1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

11.7 12.7 17 31.1 27.1 32.1 36.1 14.2 14.3 R 1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 35.4 29.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L3 L2 D1 L1 H T Max.

JIS Standard Hydraulic Cylinder

Hs D-A44 A A 49.5 Auto switch 376 Auto Switch Mounting CH2E/CH2F/CH2H Series Auto Switch Proper Mounting Positions CHQ D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA Note2) D-A9/A9V Bore size (mm) D-G39/K39 D-A5/A6 D-B5/B64 D-A3/A44 D-F5NT D-A59W D-B59W CHK CHN A A A A A A A A A A A 32 25 21.5 26.5 17 15 19 15.5 18.5 CHM 40 26 22.5

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

Table of Contents

A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LVA Connection threads R/NPT Model H A L1 M Applicable tubing O.D.

High Purity Fluoropolymer

A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

REA/REB

6 RE A B REC CX CY MQQ M RHC #2 !1 w t #6 #0 @2 u o r !3 !2 #5 !7 #1 #3 #4 e !8 @3 MK(2) @7 @8 @5 @6 RS Q G RS H A RZQ MI W S CEP1 N@4 @9 CE1 Component Parts CE2 No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Hard anodized Aluminum alloy Plate A q !

REA/REB

Description Material Note Note RS Q G Body Hard anodized Aluminum alloy Special resin Wear ring A @1 q Cylinder tube Stainless steel Special resin Wear ring B @2 w RS H A Shaft Stainless steel NBR Piston seal @3 e Piston side yoke Zinc chromated Rolled steel plate NBR Scraper @4 r RZQ Zinc chromated Rolled steel plate External slider side yoke NBR Cushion seal @5 t Magnet A Rare earth

CG1

Because pipe fittings are press-fit, they must be replaced together with the cover assembly. r Those with a bore of 50 or more cannot be disassembled.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

Membrane Air Dryer

Dew point indicator kit IDG-DP01-X001 (Option: PS) IDG-DP01-X001 (Option: P) 10 With O-ring (1 pc.) 10 Series IDG<A/IDG Reduced purge IDG<A Series Dimensions IDG30<A IDG50<A o q Option OUT IN With fitting for purge e air discharge (Option: P) r w i Purge air for dehumidification Purge air for dehumidification y IDG60<, 75<, 100< IDG60<A, 75<A, 100<A o q Option IN OUT t e With fitting for

Soft Start-up Valve AV2000/3000/4000/5000

Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I

Digital Flow Switch (Manifold type)

14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -62No.PF-OMW0004-B Integrated display type (straight type): PF3WC (mm) Flow range (L/min) a 0.5 to 4 (symbol 04) 40 2 to 16 (symbol 20) 40 5 to 40 (symbol 40) 45 -63No.PF-OMW0004-B Remote sensor type (supply type): PF3WS (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to

REA/REB

Operate the piston within a range such that collision damage will not occur at the end of the stroke. When a cylinder is used in a clamping mechanism, there is a danger of work pieces dropping if there is a decrease in clamping force due to a drop in circuit pressure caused by a power outage, etc.

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Power Valve Precision Regulator

(MPa) (Relief exhaust) L/min(ANR) L/min(ANR) L/min(ANR) Flow (Pressure reducing supply) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) 1(P)2(A) 3(R)2(A) (Relief exhaust) Flow (Pressure reducing supply) (Relief exhaust) Flow (Pressure reducing supply) VEX1530 3-06 VEX1730 3-12 VEX1930 3-20 Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) L/min(ANR) L/min(ANR) L/min(ANR) 1(P