Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

AWG

Accessory/ Optional Combinations : Combination available : Varies depending on a model : Combination not available : Available only with NPT thread Combination Accessory Option Applicable filter regulator Symbol Accessory/Optional specifications B H 1 2 6 AWG20K 8 C J N W Z AWG30K/40K C D B C D H -1 -2 -6 -8 -C -J -N -W With bracket Accessory Option Float type auto-drain (N.C.)

Filter Regulator AW30, 40

Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

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Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

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P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

F

-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38

Title not found

PT ports lfeuin-in magna (l-lopuo* ilq-hoa a""t N J K aorh .!

Micro-Mist Separator with Prefilter Series AMH

Port size 01 1/8 B 06 3/4B 02 1/4 B 10 lB 03 3/8 B 14 1 1/2B 04 1/2B 20 28 Table" combination of accessories and made to order specifications Accessories Accessooos I~p~~Tii\,"aR6~~ Applicable models Made to order specifications C 0 J R T AMHl50 AMH2S0 AMH350 AMH450 AMH550 AMH650 AMH850 D C Drain Quide 1/48 -J Accessories N.C. auto drain N.O. auto drain IN-OUT reversal -R 10 0 Element service

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

connector (20 pins) PH: Flat cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specification ... ... ... ... ... ...

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer Standard Type Series AN00 How to Order Over 30 dB (A) noise reduction Low back pressure Compact and easy mounting AN 400 04 Port size Thread type Body size 02

Model Selection 1

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Auto Switch Internal Circuit Mass (g) D-P74-376 Surge absorber Auto switch model 60 D-P74-376 Choke coil Reed switch LED LED Dimensions (mm) NO.3 () NO.4 () Indicator light Connector size M12 2 1 4 3 13.6 14 SMC Connector pin 5 32 500 44.5 2 x 2 x 6 Counterbore depth 2.4 2 x 3.4 through 5 6 4 20 Most sensitive position 16 1350 Heat Resistant Reed Auto Switch D-B30(J)/31(J)/35(J) Refer to

High Power Cylinder Series RHC

Cushion adjustment (relief adjustment) labor is the same as general purpose cylinder adjustment (cushion needle adjustment). 200 150 Cushioning quality (RHCF40-500, load weight 5kg, supply pressure 0.5MPa, horizontal drive) High power cylinder 500 General purpose cylinder Cushioning capacity [J] 100 1000mm/s 3000mm/s 2000mm/s 500mm/s 400 Stroke [mm] 300 50 200 100 50mm/s 20 25 32 40 50 63

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Thread type Type Rc NPT G Symbol Nil N F Accessory (2) Port size Symbol Nil H Description With set nut ARG40 Body size Port size Symbol 20 30 40 01 02 03 04 1/8 1/4 Accessory (1) 3/8 1/2 Symbol Nil B Description With bracket (With nuts) Mounting Angle of Pressure Gauge JIS Symbol G4 G3 G2 G1 Symbol ARG20 to 40 270 180 90 0 Mounting angle MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view

MQQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B M12 x 1 M4 x 0.7 6, 10 17 6, 10 7 19.6 4 8.1 3.2 M14 x 1 M5 x 0.8 16 19 16 8 21.9 5 9.2 4 M20 x 1.5 M8 x 1.25 20 26 20 13 30 8 15 5 M26 x 1.5 M10 x 1.25 25 32 25 17 37 8 19.6 6 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Low Friction Cylinders Series MQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 6, 10 17 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 16 19 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 20 26 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 25 32 17 T-bracket 4 x TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.