XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Low Profile Slide Table Series MXF

x 0.8 N x M4 x 0.7 thread depth 6.5 35 4H9 +0.030 0 depth 4 (Insert) A MXS 9 5 6.7 68 7 MXQ 12.5 52 27.5 18 25 41.5 28.5 MXF 20 4H9 depth 4 +0.030 0 MXW 80 MXJ NN x 4.2 NN x 8 23 12.5 MXP MXY H 6.7 2 x M4 x 0.7 thread depth 10 5.5 NN 2 ( 1) x H NN x M5 x 0.8 MTS G 11.5 Section AA A M Operating port 2 x M5 x 0.8 10 0.3 19.5 (Table length) N 2 ( 1): The number of pitches 21 7 J I Z 3 ZZ

MXF

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 4H9 depth 4 +0.030 0 4H9 depth 4 +0.030 0 80 NN-4.2 23 12.5 NN-8 6.7 H 2-M4 x 0.7 thread depth 10 5.5 NN 2 NN-M5 x 0.8 ( 1) x H G 11.5 Section AA A Operating port 2-M5 x 0.8 M 10 0.3 19.5 (Table length) N 2 ( 1): The number of pitches 21 7 J I 3 Z Max. 9 ZZ H G 27.5 5 4H9 +0.030 0 depth 4 (mm) M J I NN H G N Z ZZ Model MXF16

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

180° Angular Style Air Gripper Series MHY2/MHW2

Replacement part/grease pack part no. : 20, 25 : GR-S-005(5g) 32 : GR-S-010(10g) 40, 50 : GR-S-020(20g) 671 Series MHW2 Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9

1

x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread

LUBRICATOR

Port thread Rc G NPT C3SL-36W(Z)-A C3SL-36W-A Barb fitting Applicable tube T0604 Semi-standard Semi-standard 2 Semi-standard 23 Part no. Part no. Port thread Port thread Rc Rc G G NPT C3SL-2(Z)-A NPT C3SL-23(Z)-A C3SL-2-A C3SL-23-A External appearance drawing and part no. B B 14 Semi-standard Semi-standard 8 Semi-standard 38 Part no. Part no.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 C 31.5 20 90 70 30 40 M20 x 1.5 31 M5 x 0.8 20 K B 40 31.5 145 115 45 60 M24

Shock Absorbers and Rate Controls

(lR)otill.l5xl (M(Sl 1.0 6.44 .25',| +.005/-.000 .251 +.005/-.000 o t l +.005/-.000 .l +.001 0 .010 |1/A 1.50il/A .88 .33 .23 .44 1.6 lbs. (LRl0lilll.l5x2(t(S) 2.0 9.07 -1.01 -ri 'bo +tr 0 .010 .500 + m0/'.010 r'r/A 1.50r'r/A .88 .23 .33 .23 .44 1.6 lbs. (tRlorilt.25xt ot(s) 1.0 6.44 +.005/. .7s +M5/.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

Vacuum Pad

A B D Weight [g] ZP3P-T20PTSFK10-B5 32.5 68.5 23 28.5 ZP3P-T20PTSFK20-B5 42.5 106.5 51 41.8 6 ZP3P Series Dimensions: With Buffer ZP3P-T25PTSFJM-B5 ZP3P-T25PTSFKM-B5 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 17.5 21.5 A D B 17.5 21.5 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Modular F.R.L. Units

Refer to the attachment table on page 22 for standard port sizes when using with the AC. 23 Attachments Series AC Pressure Relief 3 Port Valve: (V) With the use of a 3-port valve for residual pressure release, pressure left in the line can be easily exhausted.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to the page 68 for dimensions with connector cable. 38 Series SYJ700 Manifold Specifications Manifold Specifications Type 20 Type 21 Type 40 Type 41 Type 42 For internal pilot Model Type 21R Type 41R Type 42R For external pilot Single base/B mount Manifold type Common

Modular Type Air Filter Series AF

18 20 24 24 B 67 97 129 165 169 245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 10 (12) 10 (12) 10 (12) 10 (13) 12 (14) 12 (14) 16 (20) 16 (20) 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) Up to

MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 (Plug : M-5P) 74 36 59 32 5 8 Operating port M5 x 0.8 Y Y 33 34 33 6H9 +0.03depth 5.5 0 39 125 Operation direction B (Plug : M-5P) Operation direction 10.5 B A 9.5 10 20 20 18 A 10.5 43 31 23 21.5 Z A Cross section AA (scale 50%) 4-M6 x 1 thread depth 12 3 x H G Bottom through hole 5.1 H 7 depth