0.5

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

MTS

Width across flats 3.5 23 9 4.5 4.5 6.5 3.5 2-M3 x 0.5 (Port size) 2-M3 x 0.5 (Port size for axial piping type MTS8-P) 9 2-M3 x 0.5, effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 41 + Stroke M2.5 x 0.45 12 53

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Hexagon lock nut Round lock nut J Nil Lock nut option Body size AS AS 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to page 490 for details.)

CA2

(Example) CDA2WL40-100 Nil J K Nil JJ KK Nil N Cylinder stroke (mm) For more information, please refer to the next page.

•

A AulO switch o o c: C' iii' JJ o Q, .J!

Precision Cylinder Series MTS

x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut part number: NTJ-006A

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Air Cylinder

H1 D 0 E0.05 I C R0.4 Width across flats B1 8 x J Width across flats NA Width across flats KA TZ ZZ + Stroke Z + Stroke With air cushion 2 x P (Rc, NPT, G) GA WA GB WB W 10 Cushion valve, Width across flats WH With rod boot 8 8 h + l IJ e JH JW f l ZZ + l + Stroke Z + l + Stroke (mm) Bore size Stroke range Rc, NPT port G port A AL B1 C CD CZ D E F H H1 I J K KA L MM NA Standard Long stroke

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

SV

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

L B + Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

HRX-OM-W038

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

HRX-OM-O021

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

HRX-OM-R005

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

HRX-OM-M090

The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

HRX-OM-R016

The weight will increase by 1kg when option J [Automatic fluid filling] is selected.