CEx-OML0058

T h e r e i s n o p a r t i c u l a r p r o b l e m i n u s i n g t h e s y s t e m . R e a d t h e i n s t r u c t i o n m a n u a l W i l l y o u d o a t h o r o u g h l y f o r t h i s i t e m a n d c o u n t e r p o s i t i o n i n g m o t i o n ?

Soft Start-up Valve

main valve (exhaust R low speed air supply), the flow passage to port 3 (R) is closed with the main valve.

Soft Start-up Valve

main valve (exhaust R low speed air supply), the flow passage to port 3 (R) is closed with the main valve.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Pilot port threaded type Pilot port configuration Body class Nil 2 Symbol 1 Body class 1 4 One-touch fitting M5 x 0.8 Applicable tubing size Valve type 3 Suck back valve Symbol Connecting tubing O.D. 3, 1/8 4 03 04 497 Series LVD Construction Standard type N.C. type N.O. type Double acting type PB PB PB q q q PA PA PA e e e A B A B A B A B A B t y r w u t y With reducer With flow rate adjustment

Series KV2 Fittings

m R M R R m p p m m R R m p p p m m p M M m p p m p p m p M m m m p p M m p p p M m p p p M R p R R p M p p R m M m p m m p m M p m m m m m m p m R m R p m m m M m p m m p m M p m m m m m m p m R m R p m m p R M R m m m p M M m p m p m R m m p p p p p p m p p R p p m m m m M m m m m p R m m m m R p m m m p M R R R p 26 Series KV2 27 Series KV2 Return Policy KV2 Warranty: SMC Corporation

One-touch Fittings Series KQ2

(mm) Thread R(PT) Part No. H (Hex.)

Clean Gas Filter

Construction q t e r w IN Description No.

asilltr

rua i Lishl 'ni'ng dr.d iFolec''v r-o'" . --{%!fi; ,Ek---r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."e D-F7P.

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

air-filter-e

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

Air Preparation Equipment

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Rotation speed (r/min) 262144(pulse) 60 Model loop gain setting Droop pulse value (pulse) 6 12 7. SPECIAL ADJUSTMENT FUNCTIONS 7.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

pa

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2130-02 VXD2130-03, VXD2140-03 VXD2130-04, VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40

Clean Regulator

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

Information

Meter-in y y u u q w e r t q w e r t i i o o !