Vacuum System Peripherals:

. 2 2 to 10 stations Both sides D side D B Double wiring specifications 08 2 to 16 stations 8 SUP/EXH block assembly specifications 09 9 Can accommodate up to 17 solenoids.

Series KC Self-seal Fittings

A1 M A2 D L Part No.

CLA

Lead wire entry Grommet [OA33(c): DINJ Grommet Grommet Grommet Response time 1.2 mS 1.2m$ 1 2 mS 1.2 mS Solid State Switch Type AUto switch model D-F59. 0-G59 D-F5P I D-GSP D-K39(C). D-J59. D-K59 D-J51 Wire type 3 W,re 3 Wire 2 Wire 2 Wire .. Output NPN PNP Application Relay, PLC Relay. PLC 24VDC Relay, AC A e~y.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

1.3 4.0 0.3 (Note 4) UL Style 2103 AWG20 2 cores Lock cable LE-CSB-RA 2 to 10 LE-CSB-RB 2 to 10 Note 1. d is as shown below. d Conductor Insulation sheath 2.

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

2 o !3 y Component Parts No.

Pin Cylinders Series CJP2/CJP

W Mounting: Basic, Flange, Foot (mm) Auto switch model D-A90 D-A96 D-A9V D-M9 D-M9W D-M9V D-M9WV D-A93 Bore size W 4 6 4 6 6 4 2 4.5 10 2.5 0.5 0 1 16 2.5 0.5 0 1 Mounting: Clevis, Trunnion (mm) Auto switch model D-M9V D-M9WV D-A9 D-A9V D-M9 D-M9W DBore size W 4 -X 6 1 0 10 0 0 Individual -X 16 0 0 0 (zero) denotes the switch does not protrude from the end surface.

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

3 Port Solenoid Valve/

Pressure Release Valve (-X538) VP744(R)-5 D YZ1-04l-l-X538 VP744(R)-5 D YZ1-04l-Ml-X538 40 1/2" [2(A) port] Safety limit switch Made by OMRON 18 Safety limit switch (made by OMRON) Part number: D4N-2B31 (G1/2) : D4N-9B31 (M12 connector) Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5

-fl Seies

ax mum stalion: 8 (Note 2) (+) and (-) iid cale lhe d rction ol DC soleno d va ve w th lrghl surge voLlage sumiessor lNoie 3) Sres VFS3o0HOM is aso possible Cable clamp 206138-1...1 pc Socket 66105-2...24 pcs. Nippon AlvlP's cable Cable clamp 206128-1...1pc Sockel 661 05'2. . .24pcs.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

ax mum stalion: 8 (Note 2) (+) and (-) iid cale lhe d rction ol DC soleno d va ve w th lrghl surge voLlage sumiessor lNoie 3) Sres VFS3o0HOM is aso possible Cable clamp 206138-1...1 pc Socket 66105-2...24 pcs. Nippon AlvlP's cable Cable clamp 206128-1...1pc Sockel 661 05'2. . .24pcs.

Speed Controller with Uni One-touch Fitting AS Series

Model Metric size ASD 8 10 4 6 AS221F-U01 AS AS221F-U02 AS321F-U03 AS-FE Note 1) Electroless nickel plated KE AS-FG How to Order AS-FP 2 2 1 U02 06 AS 1F X260 AS-FM Hexagon lock nut Round lock nut J Nil Lock nut option AS-D Body size 1/8, 1/4 standard 3/8 standard 2 3 AS-T ASP ASN Applicable tubing O.D.

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.

IDG

/2 14-19-31 28 Membrane Air Dryer Unit Type Series IDG Units (Type M, Type V) How to Order 03 IDG 30 M Option Symbol Contents Size 3 5 10 20 30 50 60 75 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size Nil Standard 3 (2) (1) (2) (2) (2) P With fitting

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

5 Port Solenoid Valve SY Series

18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 66 58.5 Max

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Modular Type Air Filter Series AF

Port size Port size Body size Body size Port size Port size Bowl Symbol Symbol 30 40 50 60 20 30 40 50 60 Applicable model AF20 to 60 Symbol 2 Note 4) Description 02 03 04 06 10 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 Bowl Metal bowl Applicable model AF30 to 60 Description Symbol Metal bowl with level gauge 8 Note 3) AF30 to 60 2 Note 4) Metal bowl Note 4) Only Metal Bowl

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

2 !

Speed Controller with

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speed controller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs.