HRX-OM-R028

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10

70pvpump

How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,

CC

98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27

7ND9071en

I41 E1 Mechanical micro switches, 2 pcs. IP66 / NEMA 4X enclosure. M20 x 1.5 conduit entry (2 pcs.). Option E2: 1/2 NPT conduit entry (2 pcs.). Temperature range: -40 to +85 C / -40 to +185 F. Japanese Ex-d Certification: II 2 G Ex d IICT6 Gb II 2 D Ex tb IICT80C Db Temperature range: T6: < +60 C. Not applicable to 3. sign "1" or "4".

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Valve mounting direction ( ) 02 2 stations Single solenoid coil is located on the opposite side of the A, B port. -: : Single solenoid coil is located on same side as the A, B port.

High Power Cylinder Series RHC

D-C73C, D-C80C Reed BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state D-B53, D-B54, D-B64, D-B59W Reed BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5NTL Solid state D-A33, D-A34, D-A4 Reed BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M D-G39, D-K39 Solid state 2 Series RHC Theoretical Output Table

RHC

9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n = 2, 4, 6, ) 4 4.5 5 6 6.5 6.5 7 CE1 D-B5/B64 D-G5/K59 D-G5W/K59W D-G5BAL D-G5NTL Since this is a

KJ

KQ 2 H 05 S 34 M H With thread seal Nil None S With thread seal One-touch fittings D Applicable tubing O.D.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Title not found

r^rE_aEIl_I ItrtrElEll+trMElr cG1 C D G l T T series i I .2: 3. .4, i.5. .6-l '?

High Power Cylinder:

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.