F

R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000 D I M E N S I O N S S E R I E S (N)AS1000-M3

3 Port Air Operated Valve Series SYJA300 1

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

Precision Regulator Series IR1000/2000/3000

Application 0 1 2 size Symbol IR1000 IR2000 IR3000 Made to Order Specifications (Refer to page 560) 01 02 03 04 1/8 1/4 3/8 1/2 Note) Air operated type is model IR3120 only.

Compact Cylinder with Air Cushion Series RQ

Type A mounting bracket . YA-03 Joint . YU-03 CQ2 RS RQ T2 V M W CQM Joint and Mounting Bracket (A and B Types) Part No.

RQ

RQ Applicable air cylinder bore YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 YA-08 80 62 10 25 11 26 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket DYA-10 100 76 12 30 14 31 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Weight (g) Part no.

Fieldbus system EtherCAT compatible SI Unit

V 10%, 4 A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Operating temperature range -10 to 50 oC Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

AC Servo Motor Driver (Pulse input type/Positioning type ）

stop SD (Note 1) (Note 1) 50.5 Thermal overload error 2 during a stop SD (Note 1) (Note 1) 50.6 Thermal overload error 4 during a stop SD (Note 1) (Note 1) 8 6 8.

0.4

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

LEC-OM071xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

5 Port Air Operated Valve Series VFA3000 1

2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for manifold) (Pilot port) (Mounting hole for

7.5

When ordering a connector assembly separately, refer to back page 8.

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 6 10 16 20 25 32 M3 x 0.5 1.8 5.5 6.4 M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 Bore size (mm) A A' B C D F E FY FK FL GA GB H J K L MM NN 6 10 16 20 25 32 M3 x 0.5 depth 5 12.5 14 18 22 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 8 8 8 8 10 12 7

Compact Cylinder with Air Cushion Series RQ

Applicable mounting bracket Bore size (mm) Joint 55 6 18 56 YA-03 32, 40 A type mounting bracket B type mounting bracket 100 8 22 67 YA-05 50 YA-03 YB-03 32, 40 YU-03 YA-05 YB-05 50 YU-05 B type mounting bracket Allowable eccentricity mm Bore size 32 40 50 1 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

125

pilot solenoid: VEX3422 41 19 3 x 1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] 3 R 1 P 17.5 39.5 Sol.b A B 65 55 45 Sol.a 5 69 121.9 112.1 104.9 M plug connector (Light/surge voltage suppressor) Grommet L plug connector Manual override + + 85.2 73.9 72.8 54.6 P2 P1 A 2 M5 (Port PE/ Pilot exhaust) 37 17.5 17.5 79 39.5 VEX3420: 1/8 Plug VEX3421: 1/8 VEX3422: 1/8 Plug (Port P1/Pilot air) 10.5 Silencer

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

LVQ

Inch sizes 4 8 10 16 22 LVQ 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Millimeter 6 10 12 19 25 Inch Valve type LQ Type Symbol 1/4 3/8 1/2 3/4 1 Basic type N.C. LVN N.C. PB PA PA TI/ TIL N.O. PB B A B A B A Basic size With reducer N.C. N.O. Double acting Double acting N.O. Double acting PA With flow rate adjustment PA PAX N.C. B A PB N.C. Double acting With by-pass PA PA N.C.

VFA3000

2 3 8 3 VFA5420-03-X1 5 0.48{0.46} 0.35 0.50 0.50 0.31 3.0{2.4} 1.6 2.0 2.0 1.6 0.50{0.49} 0.49 0.49 0.35 0.33 2.6{0.85} 2.1 2.1 1.7 1.9 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 0.35{0.34} 0.31 0.29 0.29 0.28 2.1{1.9} 1.5 2.3 2.3 1.8 0.35{0.48} 0.34 0.34 0.34 0.27 2.1{0.85} 2.2 2.2 2.0 2.0 VFA5144-03 2 3 8 3 VFA5444-03-X1 5 0.26{0.31} 0.31 0.32 0.32 0.32 3.4{2.2} 1.4 3.0 3.0 2.0 0.33{0.48}