1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

Vacuum Module Series ZX

Filter JIS Symbol 32 41 51 2 x R1.8 1 10 8.8 (Mounting hole) 3.6 19 4.8 (Mounting hole) Filter M5 (or M6) IN port M5 (or M6) OUT port 2 x 3.5 (Mounting hole) (62) 58 50 8 OUT IN 18 15.5 4 11 20 4.2 6.8 11 8.8 Bracket A (Standard accessory) Note) Dimensions : For A mounting bracket. Filter case About this product Caution The filter mounted on the product is a simplified one.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section

IIIIIII

-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t

VDW

1 (IN) port 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 M5 2 (OUT) port 15 2 x M3 x 5 2 x M2.5 x 3.5 VDW31-l G W 36 (27.6) Lead wire l Approx. 300 30 40 SMC SMC 1 1 Rectifier element AC type 4 x 5 25 34 28 Bracket assembly part no.

Mechanical Valves Series NVM, NVFM, NVZNI

-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t

3 Port Solenoid Valve Series SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 one-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" one-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc P A P B A EA B EB 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 31 Effective area at exhaust side (mm 2) S at P2 = 0.5 MPa Flow Characteristics (P A) (Condition: Inlet pressure 0.7 MPa when 2 position solenoid valve is mounted.)

10

body1 M D P M4 M5 M5 M5 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size 1 2 6 8 8 8 12.8 19 19 23 P 1 Resin body is not available. 2 Other Options, which can be combined, are A, B, D, E, Z. 3 Electrical entry direction 3 2 x M thread Depth D 90 Standard Note) Resin body is not available.

Rotary Actuator

Single vane Double vane 90, 100D 270S 180S 90S 0 5o g e n a 2 0o r 7 +4o 0 n +4o o o g n e o 0 a ti r 1 0 0 8 0 n a 9 0 o 1 +4o o t ti +4o e o a 0 g e t R n 0 o g a R o r n 0 n 9 ra o ti e a n g t io o n R at a r ot n R o (90o) (90o) ti a t o R Chamfer Chamfer (45o) Chamfer (45o) B port Chamfer A port B port A port B port (40o) B port A port A port For size 40 actuators, a parallel key will

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

Check Valve Series AK

Effective area (mm2) Weight (g) A L M Model M5, UNF10-32> AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5

LJ1H

7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

New

B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge

Soft Start-up Valve

-A AV3000-03-1 to 4G(Z)-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV3000-03-5 to 6G(Z)-A AV4000-04-1 to 4G(Z)-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV4000-04-5 to 6G(Z)-A AV5000-06,10-1 to 4G(Z)-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 AV5000-06,10-5 to 6G(Z)-A -28- DIN terminal

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy