Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

AC

Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Purchasing order is available in units of 10 pieces. 1 11 VZ1000 VQ7 Refer to L dimensions Fill in with an appropriate no. listed on the table of DIN rail dimensions shown below. d D L A L Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting D U Symbol A, B P , EA, EB D side mounting SY Passage Porting specifications (A, B) EA, EB P 03 04 M Mixed 3 8 Symbol 1 2 1 2 SV 1 2 Side Bottom D side For bottom ported: Rc 3/8 only.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D U D side mounting U side mounting Port size 2 2 stations Symbol 04 06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

Proposals for Energy Saving

Air Preparation Equipment 35 D H2 H1 8.5 A L1 High efficiency nozzle/KNH (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75

VFR

Wide range of interchangeability (D-sub connector (25P) conforming to MIL standard) Quick wiring permits easier installation. 01F VV5FR5 1 D 06 04 Series VFR5000 Manifold Thread type Nil Rc Plug-in type with D-sub connector G F U side N NPT Connector mounting direction Stations NPTF T 02 2 stations Symbol Port size D side mounting U side mounting D U A, B P , EA, EB Symbol 04 06 08 Passage

VFS

D 01F VV5FS5 1 06 04 Thread type Stations Series VFS5000 Manifold Port size Nil N Rc NPT NPTF G 02 2 stations Symbol 04 06 A, B P, R1, R2 T Plug-in type with D-sub connector 1 2 08 Rc Rc Rc M Mixed 8 stations U side F 3 4 3 4 Max. 8 stations Option Connector mounting direction Symbol For bottom ported, Rc is only available. 1 2 Porting specifications (A, B) D side D side mounting U side

Table of Contents

D. Applicable tube O. D.

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

V

I V I D U A L SUP S PA C E R VVQ2000-19A (Q2000) EXH B L O C K P L AT E KQPB L A N K I N G P L U G 04 06 03 07 AN200-KM10 S I L E N C E R (EXH P O R T) VVQ2000-R-1-C8 I N D I V I D U A L EXH S PA C E R VVQ2000-57A DIN R A I L M O U N T E D B R A C K E T [-D] Courtesy of Steven Engineering, Inc. !

Air Fittings & Tubing

D.

ZP

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

Hydraulic Filters

Differential pressure indicator d (75) (50) P E (Rc) L-type block Y Z G Q N Y Y (mm) (mm) Weight (kg)* d N P Q Y (mm) Weight (kg)* d 25 25 25 28 28 28 28 28 G 9 9 9 9 9 9 9 9 Weight (kg)* E 47 47 52 58 58 63 Z 2.8 2.8 2.8 5.3 5.3 5.4 Port size Port size Port size 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B

Speed Controller with Indicator

L5 A D2 L2 L1 T H (Width across flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm]

Vacuum Pad

04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a Dimensions common for all three drawings Dimensions