MNB

6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 60 15 25 110 85 115 120 70 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 110 115 120 2 (Different sides, same side) 15 25 90 95 (n 2) 2 25 + 55 (n 2) 2 90 + 55 (n 4) 2 110 + 55 (n 4) 2 (n 4) 2 115 + 55 (n 4) 2 120 + 55 (n 4) 2 95 + 55 n = 4, 8, 12, 16 15 + 55 n (Same side) n = 2, 4,

MNB

) 2 25 + 55 (n 2) 2 100 + 55 (n 4) 2 120 + 55 (n 4) 2 (n 4) 2 125 + 55 (n 4) 2 130 + 55 (n 4) 2 D-F5NTL D-F59F 105 + 55 n = 4, 8, 12, 16 15 + 55 n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 10 25 120 125 130 105 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different sides, same side), 1 95 100 15 80 85 90 (n 2) 2 (n 4) 2

2–4

Contact protection circuit None D-A93 2.4 V or less (to 20 mA)/ 3 V or less (to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Indicator light Red LED lights up when ON Lead wires Oilproof vinyl heavy insulation cable, 2.7, 0.5 m D-A90(V), D-A93(V) 0.18 mm2 x 2 cores (Brown, Blue [Red, Black]) D-A96(V) 0.15 mm2 x 3 cores (Brown, Black, Blue [Red, White, Black]) Note 1)

Compact Type Dual-Rod Cylinder Series CXSJ

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .

Compact Cylinder

Black D-M9V 500 (3000) (5000) Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 8 2 3.2 4.6 D-M9B(V) 4 OUT (+) Brown 6 Most sensitive position 2.8 2.7 20 2.6 OUT () Blue 9.5 4 15 2-color Indication Type Solid State Switch: Direct Mounting Style D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-F9W/D-F9WV (with indicator

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Auto Switch Mounting Height D-F5, D-J5 D-F5W, D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 A 0 0 0 3.5 6 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F Auto switch model D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A59W D-F5NTL Bore size (mm) 125 140 160 180 200 B 0 0 0 1.5 4 A 2 2 2 7.5 10 B 2 2 2 5.5 8 A 4.5 4.5 4.5 10 12.5 B 9.5 9.5 9.5 13 15.5 Hs 116 124 134.5 144 154 Hs 126 134

Brake mechanism added

) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 140 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 25 + 55 (n 2) 2 130 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) (n 4) 2 n (Same surface) (Different surfaces) (Same surface) 15 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G5BA D-G59F D-G5NT 2 2 n n 75 90 100 110 (n = 2, 4, 6, 8, ) Note 1) 15 + 50 (n 2) 2 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12,

Table of Contents

100 kPa 100 kPa 100kPa to 100 kPa 1 MPa 0 0 to 1 MPa For positive pressure 500 kPa 0 0 to 500 kPa C D Range Rated differential pressure range 1 4 For low differential pressure 0 to 2 kPa 2 kPa 0 A C B D Pressure Differential pressure Pressure Differential pressure A C B D 16-3-37 6 Series PSE300 Internal Circuit PSE300 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage

EXxx-OMN0027CN

4 DIN DIN 5 FE -28No.EX-OMN0027CN-D (1)EX600-ED2PWR INM12 5 B code 1 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V()

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

CRB2/CRBU2/CRB1

D-T991: Right-hand type D-T992: Left-hand type D-S99(V)1, D-S99(V)2 DC (+) Brown [Red] Main circuit of switch Main circuit of switch Main circuit of switch OUT Black [White] DC () Blue [Black] D-S99V1: Right-hand type D-S9PV1: D-S99V2: Left-hand type D-S9PV2: D-S9P(V)1, D-S9P(V)2 DC (+) Brown [Red] OUT Black [White] DC () Blue [Black] D-T99(V)1, D-T99(V)2 D-T99V1: Right-hand type D-T99V2:

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Compact Hydraulic Cylinder

BQ-1 BQ-2 BQ2-012 Weight (g) 1.5 1.5 5 259 CHQB/CHQWB Series How to Mount and Move the Auto Switch Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), A93(V), A96(V) 20 1.

Speed Controller with Indicator

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V R NPT Note 1) Sealant AS3ll1FSl-l02 1/4 V V V

Stroke Reading Cylinder and Counter

Operating Range (mm) Auto switch model Bore size (mm) 9.5 9.5 11.5 12 20 32 40 50 63 D-A9(V) 7 9 9.5 D-M9(V) D-M9W(V) D-M9A(V) 2.5 4 6 6 6 6.5 D-A7(H)(C) D-A80(H)(C) 9.5 12 12 11 10 12 D-A79W 11.5 13 13 14 14 16 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V) D-F7NT D-F79F 4 5.5 6 6 6 6.5 D-X Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming

CHKD/CHKG

For details, refer to pages 443 and 445. 273 CHKD Series How to Mount and Move the Auto Switch Solid state D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y7BA Reed D-Z73, D-Z76, D-Z80 Solid state D-M9N(V), D-M9P(V), D-M9B(V), D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), D-A93(V), D-A96(V) A

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]