1.1

f e d 67 300 250 (448) b 292 c a i h Example figure: HRG001-W With casters (-A) (Option) HRG005 595 550 h g 1150 f e 67 536 540 426 328 d c b a Example figure: HRG005-W 22 Series HRG Thermo-cooler Piping Connection and Installation Dimensions HRG010/015 991 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 595 1300 j i h g f e 83 918 507 440 dc a b 500 Example figure: HRG010

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

LEC-OM02704CN

P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal. D Connect the control circuit power supply.

Line filter

.: AMX-OMX0018-B PRODUCT NAME Line filter MODEL / Series / Product Number AFF20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AFF30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AFF40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Mist Separator

.: AMX-OMX0019-C PRODUCT NAME Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

Micro Mist Separator

.: AMX-OMX0020-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Refrigerated Air Dryers

) [100 VAC specification] Power cable (Length: approx. 1.9 m) Dimensions [mm] Model Port size A B C D E F G H J K L M N P Q IDU3E Rc3/8 15 IDU4E Rc1/2 483 568 355 300 13 IDU6E Rc3/4 485 15 455 498 283 275 270 31 42 80 230 32 15 240 80 284 Refrigerant R407C (HFC) IDF D IDU8E to IDU15E1 D E A B Q Illuminated switch Evaporation thermometer Ventilation air outlet Refrigerant R134a (HFC) IDU E

Hygienic Design Cylinder Series HY

C D C D C Mounting bolt part no.

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

AC Servo Motor Driver (Network card type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Rotary Table/Rack & Pinion Style Series MSQ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Cylinder with Lock Series MNB

Series Variations Applicable auto switch models Standard variations Lock system Standard stroke (mm) Bore size (mm) Solid state switch Reed switch Type Model Action Series Built-in auto switch magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL

VCL

VCHm Dimensions: Bracket VDW VQ A J LVM 4 x G C 1.5 VCA VCB VCL B D L E VCS VCW 4 x H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) B C D E F G H J L A Bracket part no.

MB1

D D D B B B Specifications and dimensions other than the above are the same as the standard type.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22