HRX-OM-X037

HRL Series 5.4 Description of the Screen 5-55 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions (1) (2) (3) (4) (5) (6) Serial communication setting Table 5.4-25 Setting of serial communication No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Suction Verification High Vacuum Suction Workpiece 1 Workpiece 2 Workpiece n Max. A P_1 H_1 n_1 Formula for Obtaining the Set Value Min.

VXR21/22/23

59 60 60 Port size P Rc H F E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Station 1) Light/surge voltage suppressor 50.5 86.5 71.5 68.2 56.5 Individual SUP spacer 7.5 19.7 Individual EXH spacer Block separation lever L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5 198 187.5 170.5 14 6 210.5 200 186.5 12 7 235.5 225 202.5 16.5 8 248 237.5 218.5 15 9 260.5 250 234.5 13 10 285.5 275 250.5 17.5 11 298 287.5 266.5 16

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

42

U D U D Thread type Nil Rc F G N NPT T NPTF Refer to page 534 (Grommet type) for wiring specifications.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

If a bend (R) is used, limit it to R3 or less. 24 PF2M7(-L) Series Dimensions PF2M701/702/705/710/725/750/711/721(-L) DIN rail mounting bracket ZS-33-Rm 18 x n pcs. + 33 18 48 38.5 DIN rail AXT100-DR-m * For m, enter a number from the No. line in the table below.

PSE530/200

The tensile strength of the power supply/output connection cable is 50 N; that of the pressure sensor lead wire with connector is 25 N. Applying a greater pulling force than the applicable specified tensile strength to either of these components can lead to a malfunction. When handling, hold the body of the controllerdo not dangle it from the cord. 1.

VVX31/32/33

(C ) Temp. conditions Power source 1.0 High temp. water (X, E, N, P) 60 40 5 0.82 0.20 0.20 Water (Std.) Oil (D. N) Steam (S,Q) Oil (Std.) VX3235-00 VX3335-00 3 1.1 0.25 0.27 AC DC 60 40 1 99 60 120 183 Maximun VX3245-00 40 1.6 0.20 0.38 4 20 VX3345-00 Minimum AC, DC Ambient temperature (C ) 40 10 Operating fluid temp.

Ejector Valve Unit Series ZYY/ZYX 1

Number of mounting holes (N) = (L3/12.5 + 1): Decimal fractions are truncated DIN rail overall length (L1) = N x 12.5 + 23 [mm] Mounting screw length (L2) = L1 10.5 [mm] Rail length on one side (L4) = (L1 L3)/2 [mm] C1 Value Selection Separate wiring type 45 33 A NA Connector box type 4586 D-sub connector 25 pin type 45F 45P Flat cable type 54 Courtesy of Steven Engineering, Inc.-230 Ryan

Magnetic Separator FHM Series

EM040-12 1/4, 3/8, 1/2 55 x L90 Oil filter Note) In the table above 1 indicates nominal filtration and 2 indicates hydraulic fluid type.

C76

Different sides Same side Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 15 60 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

C76

Same side Different sides Different Same side sides 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 15 50 + 45(n 2) D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 45 (n = 2, 4...) ( n 2) 2 10 65 15 65 + 50(n 2) 15 + 45 (n = 2, 4...) ( n 2) 2 10 60 15 60 + 45(n 2) Construction C76RA B32 to 40 2B 2D !6 i y !4 u q r e !1 t !5 !3 !0 !2 o !

Air Pilot Operated Series NVSA

PC 0111-1 1 1 O-Ring , Operatol Buna N 12 Recessed Non-Locking Operator PB 0103 13 Gasket . Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

Fieldbus System

End Plate type N Nil Positive common Negative common Note) Without SI Unit, the symbol is nil.