High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.

Solid State Auto Switches

color indication Grommet (In-line) Grommet (Perpendicular) M9NW, M9PW, M9BW M9NWV, M9PWV, M9BWV 2-color indication Band mounting style Y7BA Grommet (In-line) Water resistant M9NA, M9PA, M9BA Grommet (In-line) Diagnostic output Grommet (Perpendicular) M9NAV, M9PAV, M9BAV Water resistant S791/2, S7P1/2, T791/2 With timer Grommet (In-line) Rotary actuator S991/2, S9P1/2, T991/2 Wide detection

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.

4/5 Port Air Operated Valve Series SYJA3000

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

MXS

(mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 M 71 71 71 83 103 149 203 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 26.5 36.5 46.5 56.5

SMC

116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 HA 40 40 40 25 36 72 76 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 GA 15 15 15 42 51 61 111 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 KA 125.5 179.5 13-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 140 MXS Air slide table 1322Dimensions / MXS 12 1322Axial piping

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

5 Port Air Operated Valve

) 42 (45) 52 (58) B A B A PE PE 6.5 6.5 SYJA 5EA 3EB 1P 5EA 3EB 1P 97.5 2 x M5 x 0.8 (Breathing hole) 22.5 (26.5) 2 x M5 x 0.8 (Breathing hole) 22.5 (26.5) 94 2 x 5.3 (2 x 6.5) (For mounting) 2 x 5.3 (2 x 6.5) (For mounting) 119 VZA 110 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) VTA VGA 74 (78) 74 (78) 28.5 (32.5) 28.5 (32.5) VPA 1/4, 3/8, 1/2 [1 (P), 5 (EA), 3 (EB) port] 30 (31) 30

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.1.12-52 for DIN raile model no. Note 2)Applicable to VQZ2000 and 3000.

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x 1.25 x 23l 76 18 2-M6 x 1.0

Integrated Controller

Stroke A + Stroke (Table traveling distance)2 (52) 52 39.4 Auto switch groove (1 row per side) 10 (56)[54]4 54[(56)]4 Stroke Setup communication connector (M12) Parallel I/O connector (M12) Opposite end [Origin end]4 Origin end3 [Opposite end]4 58 (4)[2]4 2[(4)]4 38 Power supply connector (M12) 15 27.8 (48) 24 22 38.5 60 6.5 28.6 6 M4 x 0.7 thread depth 8 (F.G. terminal) D x 120 (= E) B +

Stopper Cylinder

7.5 43.5 61 17.5 E W 4 x M4 x 0.7 effective depth 7 Y Q F 2 x M4 x 0.7 effective depth 7 15.5 0.5 Mounting bolt for rod cover 2 parts 15.5 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke 25 Y E W Q F T 0 0.1 D 2 x N through 4 x O counterbore E 2 x P (Rc, NPT, M thread) Stroke RSQB -DZ (Double acting) Bore size: 16, 20 16 20 Y Q F A + 2 stroke B + Stroke V H + Stroke Width

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

with switches only) Brown Black Blue Brown Brown Load Black Blue Relay Black Blue Load Switch 1 Load Switch 1 Switch 1 Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Switch 2 Relay Switch 2 The indicator lights will light up when both switches are turned ON. 2-wire 2-wire with 2-switch AND connection 2-wire with 2-switch OR connection When two switches are connected

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111

2/3 Port Valve

7 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15(11) 2 9 Others 20(14) 3 Option 25(16) 4 1 1 Valve size 2 to 9 1 4 32(22) 5 1 B 1 4 32F Flange 40A 1 1 2 40(28) 6 1 B 1 2 40F Flange Electrical entry/Indicator light and surge voltage suppressor 2 50A Nil 50(33) 7 50F G Grommet Air operated 2B Flange E GS Grommet with surge voltage suppressor Grommet terminal 2 B 1 2 65F 65(45) 8 Flange Grommet terminal

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

with switches only) Brown Black Blue Brown Brown Load Black Blue Relay Black Blue Load Switch 1 Load Switch 1 Switch 1 Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Switch 2 Relay Switch 2 The indicator lights will light up when both switches are turned ON. 2-wire 2-wire with 2-switch AND connection 2-wire with 2-switch OR connection When two switches are connected