4/5 Port Air Operated Valve Series SYJA3000

2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating

HRX-OM-M090

HRX-OM-M090 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

5 Port Air Operated Valve

[Pilot port: Lateral (-P)] 50.5 36 4.5 45 36 4.5 45 40 40 22.5 22.5 27 3 x 4.3 (For mounting) 37 27 3 x 4.3 (For mounting) 2 x 3 (Breathing hole) 3 (Breathing hole) 101.5 50.5 102 4.4 4.4 1P 3EB 3EB 1P 5EA 5EA 4.4 1/4, 3/8 [1(P), 5 (EA), 3 (EB) port] 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 52 52 3 position closed center/exhaust center/pressure center VFA5 20(-P) 02 03 3 4 5 138 59.5 (78.5)

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

MXS

Load rate Ea= K E max Ea=1 0.11=0.11 Work mounting coeficient K: Fig.3 Max. allowable kinetic energy Emax: Table 1 Kinetic energy (E)Allowable kinetic energy (Ea) Possible to use by E=0.0 3 3-1 Load rate of work Calculate static work Wa (N) Wa=1 X 1 X 4=4 K=1 b=1 Wmax=4 a1=1/4=0.25 Wa=K b Wmax Work mounting coeficient K: Fig.3 Allowable load coeficient b: Graph 1 Max.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Solid State Auto Switches

Note 1) Refer to page 1568 for reed auto switch common specifications.

SMC

/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller

Rotary Table/

1 @1 !2 q @0 u !

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'