KJ

16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22 9.6 59 17 1 2 100 56 22.23 Reference dimensions after Uni thread installation. 15-4-34 5 Inch-size Uni One-touch Fittings Series

45

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

Compact Hydraulic Cylinder

5 V 3-wire (NPN equiv.)

VP300/500/700

N.O. 112 (55) (X port) (Rc1/8) (R port) Rc 1/2 40 (For mounting) 2-8.5 24 162.2 52 V100 (32) 3(R) 3(R) 3(R) 3(R) 48 86 1(P) 1(P) 1(P) 1(P) MAX.10 D: 173.4 Y: 172.9 SY 162.2 MAX.10 173.4 163 52 (P port) Rc 1/2 SYJ VK (Pitch) 300 Pg9 119.7 129.7 Pg9 Y: 131.7 148.7 (Non-locking) Manual override 41 37 (Lead wire length) 8 L2 129.2 139.2 124.2 134.2 D: 129.7 146.7 L1 VZ Applicable lead wire O.D

C92

3 No. !4 !5 !6 !7 !8 !

45

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

60

Grommet Conduit DIN terminal Conduit terminal L VXK21l0 VXK22l0 VXK23l0 I J 40 43 46 I J 58.5 61.5 64 I 44 53 59.5 J 46.5 49.5 52 K (92) (95) (98) I 44.5 53.5 60 J K L 30 33 36 I J 48.5 51.5 54 I J 65.5 68.5 71 I 44 53 59.5 J 53.5 56.5 59 K I 43 52 58.5 J K VXK21l2 VXK22l2 VXK23l2 2, 3, 4.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 52 61 67.5 43 52 58.5 19.5 22.5 25.5 44.5 53.5 60 (61) (129) 48 57 63.5

KQ2

10.4 10.4 12 1 4 42 1 8 1 4 38 42 3 16 16.5 3.5 11.4 11.4 14 39 44.5 1 8 40.5 44.5 14.29 1 4 3 8 1 4 40 46 17 4.6 13.2 13.2 15 17.46 40.5 46.5 1 8 20 46.5 50.5 1 4 3 8 5 16 46 17.46 52 18.5 6 15.2 15.2 18 25 45.5 51.5 1 4 37 19.05 56.5 50.5 3 8 1 2 3 8 21 7 17.9 17.9 32 Connection thread 22.23 38 51 59 1 4 26 61 55 22.23 3 8 1 2 22 9.6 21.7 21.7 30 1 2 50 54.7 62.7 Reference dimensions after

HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

JXCx-OMU0026

Setting Data Entry . 52 9.1 Profile parameter . 52 9.2 Basic parameter . 54 9.3 Return to origin parameter . 56 9.4 Step data . 57 (1) ABS . 59 (2) INC . 59 -2No. JXC-OMU0026 (3) LIN-A / LIN-I . 59 (4) CIR-R / CIR-L / CIR-3 . 60 (5) SYN-I . 60 10.

AC Servo Motor Driver (CC-Link Type ）

ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved RY(n 3)F Note.

AC Servo Motor Driver (CC-Link Type ）

ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved RY(n 3)F Note.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN terminal (D, Y): 10-SYJ5123-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] 63.2 [65.4] 82.1 83 72.1 3 3 58.2 64.7 3 3 42.2 19.5 19.5 19.5 11 11 11 19.5 11 2 x 2.6

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Series VQ Base Mounted Metal Seal/Rubber Seal

position closed center VK 3 VZ Note) LO type valve is used for F, P, T, and S kits.

0.4

Note 2) : Stations 02 to 24 Note 3) For S/P/F/L kits Replacement Parts No. Part no. Description Material Quantity VVQ1000-80A-1 VVQ1000-80A-2 VVQ1000-80A-3 VVQ1000-80A-4 o !0 !1 !

Free Mount Cylinder for Vacuum Series ZCUK

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Yes Yes Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12 V Reed switch Solid state

Programless controller Step motor (servo 24 VDC)

Example) Setting of position number 3 (A) Setting by Jog / inching (f) 1) Set the position switch (h) to the required position ("3" in this case).

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .