REC

Speed Stroke Stroke Time Time Stroke P=0.5MPa,M=10kg P=0.3MPa,M=10kg M=10kg M=30kg V=300mm/s V=100mm/s Variations Max. stroke (mm) Bore size (mm) Standerd stroke (mm) Applicable auto switch Mounting 20 Reed switch: D-C7, C8 D-B5, B6 Solid state switch: D-H7, D-G5, D-G3, K3 Double clevis: D Front trunnion: U Rear trunnion: T Basic: B Axial foot: L Front flange: F Rear flange: G Single clevis

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

VP300/500/700

Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

AR Series Modular Type Regulator

Cannot be used with M: Round pressure gauge (with color zone). Available by request for special.

RHC

36.9 270 32 9 233 M10 x 1.25 193 5.8 to 8.8 27 20 25 1/4 MI W S 60 53 45 7 M30 x 1.5 19.6 17 43.5 43.9 278 38 9 241 M10 x 1.25 195 27 23 32 3/8 75 62 55 7 M33 x 2.0 25.4 22 52.5 47.3 292 41 11 251.5 M14 x 1.5 201.5 30 25 6.8 to 11.3 40 3/8 CEP1 CE1 50 to 100 H EA CE2 EA FA GA A NE Rc P Rc P GA M Effective thread ML2B K WH ND H1 MM C J G5-S I C B CV D E LY 4-LD LH0.2 MVGQ LT CC JC Y X JC Y

Booster Regulator Series VBA1110 to 4200 1

2 VBAT10-Y-2 Accessorys part no.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Title not found

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

REC

CE1 CE2 Stroke Stroke Speed ML2B Space-saving has been realized by simple circuit Comparison to Shockless Transfer Systems C J G5-S Time Time Stroke CV P = 0.5 MPa, M = 100 N P = 0.3 MPa, M = 100 N M = 100 N M = 300 N V = 300 mm/s V = 100 mm/s Sine Cylinder Cushioning keep up with depth of orifice as sine function which change depend on stroke.

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel

Series: 25A-ISE20, Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron NDH10 NX Applicable

3 Port Air Operated Valve

Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

Information

L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Series SV

block (m) No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

CC-Link-E

Be sure t o cut t he pow er suppl y t o t he product w hen cut t i ng t he pressure suppl y. The product i s adj ust ed t o each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory. Avoi d unnecessary di sassem bl y or rem oval of part s, as t hi s m ay cause f ai l ure. 3 CAU TI O N Take t he f ol l ow i ng m easures agai nst m al f unct i on due t o noi se.