MQQ L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.
: Power Supply 24 VDC 10% 12 to 15 VDC Vin: Input signals 0 to 5 VDC 0 to 10 VDC Monitor output wiring diagram Brown Analog output, voltage type Blue White Monitor output voltage Black 849 B Specific Product Precautions 2 Series ITV0/1000/2000/3000 Be sure to read before handling.
2 15 SMC SMC 34 SYJ Cover diameter 1.6 Cross section 0.34mm2 1 5 P 3 R2 R1 Manual override SX 56 48 4 VK (54.5) VZ VF 51 45 VFR A, B port 22 16 16 SMC 9 9 9 VP7 2-PE port M5 X 0.8 (Not applicable to standard.) 18 18 2.1 5-Rc(PT)1/8,1/4 (P, A, B, R1, R2 port) 2.1 VP4 28 M5 X 0.8 External pilot port (Only external pilot style(R)) VQ 0 1 01 02 L plug connector (L): VQZ225 (R)lLl 0 1 01 02 DIN
(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22
B1 2 x M Depth 5 H B1 G A 2 x P Port size B i b Faston type D 11 Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1/4, 3/8 1/2 3/4 1 H J M 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22
Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
" # $ # VX21/22/23 VXD21/22/23 $ $ $ $ $ $ VXP21/22/23 VXR21/22/23 % $ $ && &'& && &'& && &'& ($ )* && &'& && &'& !
size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8
(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)
Assembly / Disassembly procedure 4.1 With vertical auto switch unit 19 Cross recessed round head screw 2 For D-M9 18 Switch holder 2 For D-M9 Size: 10, 15 17 Cross recessed round head screw 2 3pcs. for size 15 16 Cross recessed round head screw 2 15 Cross recessed round head screw 2 14 Holding block (B) 2 13 Switch block (B) 1 12 Switch block (A) 1 3pcs. for size 15 11 Cross recessed round
A IZT4-16 2 160 4 13 IZT4-22 3 220 6 13 Metric IZT4-34 5 340 8 15 IZT4-40 6 400 10 22 IZT4-46 7 460 3/16" 15 1/4" 14 IZT4-58 9 580 Inch 5/16" 15 IZT4-64 10 640 3/8" 23 IZT4-82 13 820 Elbow (mm) IZT4-112 18 1120 Applicable tube O.D.
C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.
HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15
(relates to position of the unit within the manifold). : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) Unit No. for IO mapping position. -49No.EX-OMV0017-B (b).
When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.
19 D-A44C DIN terminal RLQ D-A90/A93/A96 D-A90V/A93V/A96V 9-15-20 MLU D-90/97 Grommet Direct D-90A/93A ML1C D-Z73/Z76/Z80 9-15-21 DD-E73A/E76A/E80A 9-15-22 -X Grommet Band D-B59W 9-15-23 2-color indication Grommet Rail D-A79W 9-15-24 20Grommet Tie-rod D-A59W 9-15-25 Data This auto switch can be mounted by tie-rod with using mounting bracket.
For details, refer to page 9-15-68. Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available. For details, refer to page 9-15-42. 9-8-22
bolt B adjustment amount Adjustment bolt B adjustment amount Adjustment bolt B adjustment amount 90 Rotation 90 Rotation 90 Rotation 15 Rotary Table Series MSQ Clean Series Prevents the particulates generated by the bearings from entering the clean room by vacuuming through the vacuum port on the side of the body.
20 10 22 22 11 11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.
) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5