-09S 51.3 28.2 46.9 NPT 1/4 38 19 15.2 19.8 23 43 15.4 41.9 48.8 43.8 21 3/8" ASD530F-N02-11S 54.1 84 32.6 23.1 18.5 17 1/4" ASD530F-N03-07S 48.7 25.6 13.2 93 20.3 18.5 5/16" ASD530F-N03-09S 51.3 28.2 46.9 NPT 3/8 35.3 19 19.8 23 15.2 14 41.9 46.5 41.5 40.3 3/8" ASD530F-N03-11S 102 54.1 64.3 23.1 25.9 21 32.6 18.5 42.1 26.5 28.6 3/8" ASD630F-N04-11S 180 18.6 57.6 NPT 1/2 50.1 49.6 23.8 64.8
Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)
8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 31 25.8 30.9 24.2 30.9 32.1 26.3 31.3 32.8 31.6 33 34 39.3 35.3 40.6 12 12 M10 x 1 Applicable tube 4 11 5.6 12.6 12 M10 x 1 H2 H1 T 17 6 15 13.1 13.6 17 M14 x 1 19 Connection thread L2 M 17 8 26.1 16 16.1 19 M15 x 1 19 L1 10 19 19 41.5 17 21 M18 x 1 21 24 12 21 58.3 18.6 24 M20 x 1 96 113 16 28 20.8 29 30 M27 x 1 Note) Value of FEP tube.
AEP 0X 21 ZSE3 HEP Related PV, V port size Wiring specifications Equipment Grommet (0.6 m) Nil M5 x 0.8 M6 x 1 (Option) Nil Without connector Connector (3 m) Connector (0.6 m) Grommet (3 m) Y C L CN CL Output specifications NPN open collector, double output Without analog output NPN open collector, double output With analog output 21 Note) Analog output is available only for grommet type.
G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 G P MK CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)
16" 1/4" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 11.4 12 9.3 11.4 13.2 11.4 13.2 15.2 13.2 15.2 17.9 17.9 21.7 12.7 12.7 10.5 10.5 13.5 12.7 13.5 17 18 17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1
Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model Port size 1/4, 3/8, 1/2 3/4 3/4, 1 Pressure gauge port size 1/8 Fluid Air 5 to 60C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
Note 6) : For thread type: NPT only 1075 A 1021-AR-B Regulator 1021-ARK-B Regulator with Backflow Function Standard Specifications 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size 1/8 Air Preparation Equipment Pressure Control
119] 134 [143] (For FZ) SQ 21 [25] 23 [25] 46 [55] VFS 5 1 3 VFR 31 [39] 31 [39] 5 x 3/8, 1/2, 3/4 56 [60] (Piping port) VQ7 [ ] = 3/4 2 position double: VFR520 -F(Z) 0 1 3 position closed center: VFR530 -F(Z) 3 position exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0 1 0 1 0 1 1/8 External pilot port 3 x 2.3 2 x 7 [For 3/4] (Electrical entry) (Mounting hole) 1/8 (
3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.
6.5 6.5 7 7 3H9 depth 2.5 +0.025 0 12 1 B A NN-M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 48 58 68 86 96 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-
-02 R 1/4 10 -03 10 R 3/8
SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5
3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 12.7 10 10 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 13.5 12.7 13.5 17 18 17 18 21 22 21 22 22.4 25.2 6.2 11.8 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8 19.8 19.8 26.5
6 M8 x 1.25 16 21 97 102 140 20 17.5 55.5 12.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 11 49 6 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E HN (max.)
-02 R 1/4 10 -03 10 R 3/8
2 x 5.6 Mounting hole 2 x 5.6 Mounting hole 30 45 Manual override 129 91.5 41.3 32 30.6 27 78.8 41.3 32 30.6 27 PE X PE X R1 R2 P R2 P R1 14.5 14.5 19.5 (21) 19.5 (21) 1/8" External pilot port 1/8" PE. port 31 31 1/4", 3/8" 19.5 (21) 19.5 (21) 1/8" PE. port 31 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/4", 3/8" 1(P), 4(A), 2(B), 5(R1), 3(R2) port : Values for 3-position ( ): Values for 3/8
F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221