Air Cylinder

, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 65 2 (Different surfaces and same surface) 1 10 75 80 90 D-Y6912, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 95 2 (Different surfaces and same surface

AC Servo Motor Driver (SSCNET /H Type)

12+150n 13+150n Pr.10 Deceleration time 0 18388608(ms) 1000 14+150n 15+150n (Note 1) Refer to the operation manual for used equipment for details.

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

PSxx-OMV0008CN

.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

Information

[C] [60 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] HRS018-A-10/HRS018-W-10 (Single-phase 100/115 VAC) 2500 2500 25C Cooling capacity [W] Cooling capacity [W] 25C 2000 2000 32C 1500 1500 32C 40C 1000 1000 40C 500 500 Ambient temperature or facility water temperature Ambient temperature or facility water temperature 0 0 [50 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C]

AC Servo Motor Driver (SSCNET Type)

Axis No. settings . 12 5. Parameter list (Driver side) . 13 6.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Mounting the side supports Number of side supports : N (MY-S50A) Stroke N L1 (mm) Bolt Max. tightening torque [Nm] (QTY.) 200 6 300 6 400 6 500 6 600 8 15 M8 x 1.25 12.5 800 8 1000 10 1200 12 1500 14 Secure the side supports using the support spacing (L) in the table above. When mounting wit the side supports, use in combination with the pin on the bottom of the body.

HRX-OM-X037

Refer to Table 5.4-12 Offset setting for details. (1) (2) Offset setting Table 5.4-12 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 300 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Speed [mm/s] *1 to 400 10 to 700 5 to 360 20 to 900 12 to 600 6 to 300 24

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Bore size (mm) MXP10-PS 10 MXP12-PS 12 2 pieces of no. !

Clamp Cylinder with Lock

Extension locking (F) M3 x 6 11 2 x Rc1/8 Extension port 39 3 x Rc1/8 Retraction port Dust cover 20 60 25 34 + Stroke 5 6 12 53 4 12 Head end cushion valve 9.5 19 47 45 M10 x 1.25 40 12 47 10 26 Width across flats 10 26 Width across flats 36 R12 12 +0.5 +0.2 0.040 0.076 Shaft: 10d9 Hole: 10H8 26 12 6 +0.022 0 102 + Stroke 55 41.2 169 + Stroke 49 Note) Refer to page 14 and 15 for Accessories

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

32 40 50 63 80 100 up to 700 25 79 32 64 10 3 7 50 C85 up to 800 31 90 36 72 10 3 9 55 up to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B

HRX-OM-Y098

Refer to Table 5.4-12 Offset setting for details. (1) (2) Offset setting Table 5.4-12 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

HRX-OM-W060

P.5-12 (15) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (16) Operation mode P.5-12 Common or serial communication ( mode). (17) Operating condition display It indicates the run and stop status of the product. P.5-12 (18) Run/Stop To run/stop the product.

HRX-OM-S004

4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-6 Cooling capacity(HRS150-A-20/40/46/46-) 8.4 Cooling capacity HRS Series 8-12 HRX-OM-S004 Chapter 8 Documents : Facility water temperature 32 oC 8.4.3 HRS100-W-20/40/46: Facility water temperature 40 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

Fieldbus system PROFINET compatible SI Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 If the data format is scaled data format

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

25

Static neutralization data when voltage is reduced from 1000 V to 100 V.