CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

GA 8 8 GB 5 5 H 5 5 MM 28 28 Bore size 11 11 10-0.022 0 12-0.027 0 With air cushion Air cushion type is not available for 21-/22-CJ2.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

Stability of suction position,

/With Male Thread Adapter: Vacuum Inlet Lateral Pad form Bellows type with groove ZP3E-Y32BMl-AL14 ZP3E-Y40BMl-AL14 ZP3E-Y50BMl-AL14 M14 x 1 Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 0 5 1 0 1 Y (Example) Manual override B C Flat cable with power supply terminal block and 3m cable VV5Q11-08C6G2 VQ1100-5 VQ1200-5 VQ1300-5 Series Non-locking push style Push-locking slotted style Push-locking lever style 1 set Manifold base No. 4 setsValve No. (Stations 1 to 4) 1 set Valve No. (Stations 5) 3 setsValve No.

F

18.5 21.6/14.9 3/16 6.3(1/4) KQL05-07 11.4 10 19.5 34.5 23.5 16.5 3.5 8 12 KQL08-12 15.2 12 23 40.5 26 18.5 21.6/14.9 3/16 8(5/16) KQL05-09 11.4 10 19.5 36.5 24 16.5 3.5 10 12 KQL10-12 18.5 17 26.5 42 30 21 35.2/25 1/4 8(5/16) KQL07-09 13.2 10 20.5 37.5 25.5 17 4.6 1/4 9.5(3/8) KQL07-11 13.2 10 20.5 39.5 25 17 4.6 5/16 9.5(3/8) KQL09-11 15.2 12 23.5 40.5 27.5 18.5 6 5/16 12.7(1/2) KQL09-

4/5 Port Air Operated Valve Series SYJA3000

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-22 Series SYJA5000 4/5 Port Air Operated Valve Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 2 position

HRX-OM-X037

display . 5-9 Current circulating fluid temperature [PV] . 5-10 Circulating fluid set temperature [SP] . 5-10 Circulating fluid discharge pressure [Press PV] . 5-11 Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Operation mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-14 5.4.4 Information

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1263.5 906 960 12 4 800 180 11-LEJS40S-10001323.5 1363.5 1006 1060 14 5 1000 80 11-LEJS40S-12001523.5 1563.5 1206 1260 16 6 1200 80 535 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS63 Body mounting reference plane Note 2) 4 x M8 x 1.25 depth 12 6H9 ( ) depth 7 +0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68

VQ4000

Nil W 2-5-5 Base Mounted 6 Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Courtesy of Steven Engineering

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-Vl Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 Phillips /Ordinary Round Head Screw Gasket Series SY3000-23-4 (M2x21) SY3000-11-8 SY3000 M3x26 (Non Glare Nickel Plating) SY5000-11-2 SY5000 M4 x 31 (Non Glare Nickel Plating) SY7000-11-2 SY7000

smcmaintenancepartslist

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Air Slide Table Series MXQ

M 15 25.5 MXQ-CS 6 (L)-X11 5 18 MXQ-CS 8 (L) B MXU 8 7 22 3 9 7.5 16.6 14.6 8 9.8 MXQ 8 (L) M6 x 1 15 M3 x 8 M3 x 10 28 MXQ-CS 8 (L)-X11 F 25 38 MXQ-CS 8 (L)-X12 MXS 5 22 MXQ-CS12 (L) G E MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 12 9.5 29 4 14 11 20.5 18.5 11 13 15 32 MXQ-CS12 (L)-X11 C MXQ 25 MXQ-CS12 (L)-X12 42 5 23 MXQ-CS16 (L) Table mounting section MXF M10 x 1 MXQ16 (L) 14 11 36 5 17 M5 x 16

Cylinder with Lock

5.5 5 6 D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-Z7/Z80 5 6 6.5 6.5 7 8.5 7.5 9.5 9.5 10.5 D-A3/A44 D-A3C/A44C D-G5NBL 35 35 40 40 40 9 10 11 11 11 D-A5/A6 D-B5/B64 D-A59W D-B59W D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DW D-P4DWL 4.5 5 6 5.5 6 13 13 14 14 15 4 4 4.5 4 4.5 14 14 17 16 18 Since this is a guideline including hysteresis, not meant to be guaranteed.

Air Cylinder

2.36 9/32 2 3/8 6.44 7/16-20 1.71 1.06 1.84 1.26 3/4 2 1/4 3 5/8 200 (2") 5/16-24 3/8 M16 x 1.5 7/16 1.81 5/16-18 2.6 0.3 7/8 9/16 1 1/8 5/8 11/32 1 1 15/16 2.40 11/32 2 1/2 3/8 6.44 7/16-20 1.75 1.06 2.19 1.30 3/4 2 3/8 3 3/4 250 (2.5") 5/16-24 3/8 M16 x 1.5 19/32 1.69 3/8-16 3.1 0 1 1/4 9/16 1 1/8 5/8 11/32 1 1 15/16 2.48 11/32 3 3/8 8.02 3/4-16 2.34 1.10 2.76 1.57 1 1/8 2 5/8 4 1/4 325

EX120/121/122

0 0 3 2 1 0 0 1 2 3 0 + + 0 80 40 7 6 5 4 4 5 6 7 1 1 to to to to to to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts

Plate Cylinder

M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5 GY 5 5.5 7 8 10 H 36 40 45 53 56 K 5.5 5.5 6 7 7 KA 10 12 14 18 18 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 (mm) (mm) Rod End Female Thread P TN TF NY NX NS NE ND NC N MM Model S ZZ MM M6 x 1 depth 12 ZZ 74 77 85 102 106

Speed Controller with Indicator

08, 09, 10, 11 03, 04 200 400 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.