IZx-OMT0049

to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 10 200 to 300 200 to 1400 200

HRS100/150

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI HECR t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.

5 Port Air Operated Valve

) Note 1) 300/50 Note 1) Impact resistance: No malfunction to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

SMC Wireless System EtherNet/IP ® compatible

Vibration resistance (Excluding valve manifold) Conforms to EN61131-2 Impact resistance 147 m/s2, 11 ms (Excluding valve manifold) Standard CE marked Weight 300 g Communication standard ISO/IEC14430B (Type-B) NFC communication specifications Frequency 13.56 MHz Communication speed 20 to 100 kHz (I2C) Communication distance Up to 1 cm 1: The configuration file can be downloaded from the

SMC Wireless System PROFINET compatible

(Excludes valve manifold) Conforms to EN61131-2 Impact resistance 147 m/s2, 11 ms (Excludes valve manifold) Standard CE marked Weight 300 g Communication standard ISO/IEC14443B (Type-B) NFC communication specifications 4 Frequency 13.56 MHz Communication speed 20 to 100 kHz (I2C) Communication distance Up to 1 cm 1: The configuration file can be downloaded from the SMC website: https://www.smcworld.com

5 Port Air Operated Valve Series VFA3000 1

Refer to page 5-11-4.) Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

VFRA3000

Refer to page 5-11-4.) 2 position double 3 position exhaust center Not required Lubrication (2) Mounting orientation Free 300/50 Impact/Vibration resistance (m/s2) (3) Note 1) In case of single type, be certain that supply pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port 1(P) for activation.

Compact Vacuum Ejector Series ZA

G The lead-wire length for a valve with a lead-wire is 300 mm. When in need of a valve with a lead-wire longer than 600 mm, place an order for a valve without a connector and connector assembly.

ZSE30/ISE30

amplitude in X, Y, Z directions for 2 hours each 100 m/s2 in X, Y, Z directions 3 times each Compliant with CE Marking and UL (CSA) standards Standard Note 1) When switch output is selected, analog output is not available.

Multi-Axis Step Motor Controller

(Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.

Thermo-con/Rack Mount Type

Thermo-con/Rack Mount Type Air-cooled HECR Series Dimensions HECR002-A5 HECR-A Air-cooled Water-cooled HECR-W Model Selection Specific Product Precautions Options Optional Accessories Caution label/Electricity Warning/Caution label 300 (11) (33) Air 430 27 Air Display/Operation panel Ventilation hole (air inlet) Power switch Handle (for carrying the product) Tank lid (with gasket) 166 10

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

65.7 72.2 79.6 89.6 Max. 10 Pg7 Approx. 300 (Lead wire length) 68.1 [75.1] 44 M8 x 1 61.5 71.7 41.6 Approx. 300 (Lead wire length) 83 57 [64] 90.5 Applicable cable O.D. 3.5 to 7 Refer to the page 68 for dimensions with connector cable.

Programless Controller Series LECP1

MNPN MPNP CN4 24 VDC for I/O signal 24 VDC for I/O signal CN4 1 Step Motor (Servo/24 VDC) Specific Product 1 COM+ COM+ 2 2 COM COM 3 3 IN0 IN0 4 4 IN1 IN1 5 5 IN2 IN2 6 6 IN3 IN3 7 7 RESET RESET 8 8 STOP STOP Load Load 9 9 OUT0 OUT0 10 10 OUT1 OUT1 11 11 OUT2 OUT2 12 12 OUT3 OUT3 13 13 BUSY BUSY 14 14 ALARM ALARM Input Signal Output Signal Name Contents Name Contents COM+ Turns on when the

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

VP300/500/700

Non-locking push type Locking type (Slotted), Locking type (Manual) Manual override Mounting orientation Unrestricted 300/50 Shock/Vibration resistance (m/s2 )(2) Note 1) Based on dynamic performance test, JIS B 8374-1981.

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13 7 6 9 8 11 10 3 Connector B terminal no.