Series AP500

plated for AP9030 40 0.28 Dimensions 30 0.21 inch (mm) 20 0.14 AP9000 & 9100 10 0.07 3.5 (89) 0 0.00 0 200 400 600 800 100012001400 160018002000 Flow rate (slpm, N2) 0.75 (19) AP9030 600 psig (4.1 MPa) Inlet pressure: 300 2.1 250 1.7 Max. 11.2 (284.5) Delivery pressure (MPa) Delivery pressure (psig) 200 1.4 4.00 (101.6) 150 1.0 5.38 (136.7) 100 0.7 HP LP 50 0.3 0 0.0 1.13 (28.7) 0 200 400

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

High performance type Step Motor Controller (Servo/24 VDC)

Conversion cable 21 No.JXC-OMY0002-A 2 Connection with a PC Controller PC 120.3 120.3 mm mm 200 200 mm/s mm/s Communication cable USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 SI When using the LEC-W2, it is necessary to connect a conversion unit (P5062-5) to the communication cable.

Servo Motor Controller (24 VDC)

Conversion unit Controller USB cable (A-miniB type connector) 120.3 120.3 mm mm 200 200 mm/s mm/s Communication 100 500 100 500 1 1 200 1000 200 1000 2 2 CN4 50 200 50 200 3 3 cable PC (The PC should be obtained separately.) Controller PLC, etc.

HRX-OM-Z002

Refer to Table 5-11. Make a selection with the [] [] keys and press the [SEL] key to apply the setting.

VQC

B 23 () (+) Gray Red 11 () (+) White Red AXT100-DS25-050 SOL. A When using a standard commercial connector, use a type 25P female connector conforming to MIL-C-24308. Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Conversion cable 25 - (2) Connection with a PC Controller PC 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) Communication 100 500 100 500 1 1 200 1000 200 1000 2 2 cable 50 200 50 200 3 3 SI When using the LEC-W2, it is necessary to connect a conversion unit (P5062-5) to the communication cable.

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

JIS Standard Hydraulic Cylinder

10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F

MXW

220.5 MX A 51 31 31 31 31 MTS B 104 124 149 174 199 MXW12 W 31 11 11 11 11 MY V 124 144 169 194 219 A 59.5 34.5 34.5 34.5 34.5 34.5 W V CY B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 W 39.5 14.5 14.5 14.5 14.5 14.5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without