VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

F

17.5 14.5 17 15.5 3.5 3.1 6 M5x0.8 KJT06-M5 7 11 17.5 15 17.5 15.5 4.5 4.2 6 R(PT)1/8 KJL06-01S 10 11 19.5 16.5 18 15.5 9 6.1 6 R(PT)1/8 KJT06-01S 10 11 19 17.5 19 15.5 11 7.1 Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g) Applicable Thread Model H D L1 L2 A M Minimum Weight Tube O.D T (Hex) Hole (g) (inch) Diameter (inch) Diameter 1/8 10-32UNF KJT01-32 7

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time s Initial exhaust valve 0.07 0.08 0.09 0.23 0.27 KF (

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Brake mechanism added

27 71.5 22 60 42 20 44 22 16 21 11.5 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5

KR

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

NCQ8

VESSEL Wire stripper No 3000G TOKYO IDEAL CO., LTD Strip master 45-089 Stripper for a round cable (2.0) can be used for a 2-wire type cable.

Microspeed Cylinder

rod cylinder; refer to the series CJ2 section in Best Pneumatics No. 2 How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

reduces flow setting time

52.2 14.2 42 AS331FS1-03-11 (S) 3/8 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS431FS1-04-11 (S) 3/8 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69 AS431FS1-04-13 (S) 1/2 18.5 21 26.2 48.3 28.3 63.4 17 72 8.2 16.5 29.9 17.5 40.1 49.7 48.3 44.2 42.8 13.3 21.5 16.2 1/4 17 (17.5) 12.9 13 595 AS-FS Series Dimensions: Elbow Type Seal method: Face seal For G thread

XM, XY

80 160 200 Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperatures, excluding gas permeation (Standard material: FKM) External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time

Fieldbus System

Note 2) Only direct mounting is available for Type 11 (Bottom ported). * Bottom ported type of the SY3000 uses the manifold base of the SY5000.

Regulator

45 42.5 82.5 42.5 82.5 42.5 82.5 AR60-D 1/8 95 155 45 45 45 42.5 82.5 42.5 82.5 42.5 82.5 3/4 M421.5 3/4, 1 1 Bracket mount Model Optional specifications Panel mount Q R U AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113

5 Port Solenoid Valve Series SV1000/2000/3000/4000

specifications for up to 11 stations.

VQ4000

W Dust proof Dust tight, Jet proof V V 1.11-5 Series VQ4000 Plug-in Conduit terminal 0 1 2 position single: VQ410 l 23.5 23.5 50 158 50 90 108 158 Indicator light 11 (A port) 11 (B port) (12.5) 5 3 (12.5) 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 25.6 Mounting hole 14 5 1 3 12 30 45 25.6 Mounting hole 5-Rc1/4, 3/8 (R1, R2=Rc1/4) Manual override Bottom piping SMC (A, B port

Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

New

z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston connector Electrical entry 250 Series Grommet (with Size Port size P A B B1 C D E F Grommet surge voltage suppressor) 11 Q R Q R 9 6.5 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 19 24 24 30 43 45 45 50 21 22.5 22.5 25 61 76 81 86.5 30 35 40 40 9.5 12 12 15 20 22 24.5 24.5 27 29.5 32 32 42 53.5 58 61 30 32.5

Rotary Actuator/Vane Style Series CRB1

78 7.5 11 140 30 65 28 11.5 24.9 25 45 CRB1BW 100-E 38 38 For single vane: Above figures show actuators for 180 when B port is pressurized.

IDG

(Refer to page 14-19-11.)

CRBU

11-3-4.