VQ7-6/7-8

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 X 45 with SW M6 X 18 with SW M6 X 55 with SW M6 X 85 with SW M6 X 100 with SW M6 X 105 with SW M6 X 125 with SW M6 X 140 with SW M6 X 145 with SW M6 X 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

EXxx-OMN0029CN

PLC SI PLC SI MS NS PLC (PLC MS NS ) 11 MS SI PLC SI MS NS/ DeviceNet V_SEL PLC SI PWR(V)LED DC24 V+10/-5 SI SI 12 SI EX600-SDN1A(PNP ) EX600-SDN2A(NPN ) SI SI -40No.EX-OMN0029CN-D No. (PNP NPN) SI PWR LED DC24 V10% (PNP NPN) 13 SI PWR(V)_LED DC24 V+10/-5 PLC -41No.EX-OMN0029CN-D No.

125

3 Port 3 Position Valve VEX3 Series Pilot Solenoid Air Operated RoHS Intermediate stopping of cylinders up to 125 * is possible.

Title not found

Series SV1000 sv1000 Spacer type { Pori sze lor Series SV2000/3000/4000 sv2ooo I ile sv4000 1/4 sY5000-11-15 sY7000-11-11 n. ,* 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported lvlodel [,landold Pilch (mm) Appllcable cyrnoef I/etalseal voz1000 t o 0 1 3 15 0.35 ta 0 56 0 . 1 9 Up to o50 Upto o80 vQz2000 voz3{mo UD 10 olO0 Optonil atching coil valve operates the same as a 2 position

Hand Valve Series VH 1

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. Design Piping Caution Caution 1. Not suitable for use as a selector valve or a divider valve. The valve can malfunction due to air leakage. 2. Not suitable for vaccum applications. The valve can malfunction due to air leakage. 3. Do not supply air pressure from other ports than 1(P) port.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

, 21-/22-: Lithium soap based grease 10-/21-: Class 4, 11-/22-: Class 3 685

Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

7.4

C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5

Thermo-chiller

Displays the unit of displayed pressure (default setting: MPa). 11 Changing pressure unit Pressure unit can be changed. MPa PSI r [REMOTE] lamp Enables remote operation (start and stop) by communication.

Modular Type Lubricators Series AL

5 is attached. 949 Series AL800/900 Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1 4

PFxx-OMJ0005CN

) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

V

ZPX Buffer Stroke Pad 40 50 63 80 100 125 25 50 75 100 Courtesy of Steven Engineering, Inc. !

Title not found

rc 1o Indcale thewnnO spec l.ar ons n the specilicalion sheet Note 4) F.r exlenal pr ol oplDn, F ndca|elhe qter.a p otsp6licaton R fordre appricabre var@s as @11 Note 5) The o!

CE

11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

Process Pump

2 12 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

(Connection port center) (Connection port center) F (Bracket mounting dimensions) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141