Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series MSQ Dimensions: Size 70, 100, 200 Basic

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

Thermo-chiller/Rack Mount Type

8 1 12 Contact input signal 2 Input OFF 13 Contact output signal 1 Output Run status signal (N.O. type) 14 Contact output signal 2 Output Remote status signal (N.O. type) 15 Contact output signal 3 Output Alarm signal (N.C. type) 15 9 D-sub 15-pin female (socket) type Contact input/output signal connector 30 HRR Series For details, refer to the Operation Manual on the SMC website.

Fieldbus system Analog unit

10 to 10 V -5 to 5 V -20 to 20 mA 7FFF 7FFF 32767 10.5 5.25 21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB -23No.EX-OMN0038

RHC

mm) RS Q G Bore size (mm) No. of auto switches mounted Auto switch model 2 1 Auto switch model n 20 25 32 40 50 63 80 100 Different sides Same side Different sides Same side D-C7/Z80 D-C73C/C80C RS H A 8 10 9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15

Dual Speed Controller with One-touch Fitting Series ASD

(Refer to pages 15-6-3 to 15-6-5 for details.)

Mechanically Jointed Rodless Cylinders

MY3A40-16AStroke MY3A25-16AStroke MY3A63-16AStroke MY3A16-16AStroke 1 Seal belt 9 Polyamide Stainless steel NBR NBR MY3A40-16BStroke MY3A25-16BStroke MY3A63-16BStroke MY3A16-16BStroke 10 Dust seal band 1 Gasket bumper Piston seal RMA-40 RMY-40 RMA-25 RMY-25 RMA-63 RMY-63 RMA-16 RMY-16 15 16 2 2 Polyamie 18 MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 MYA16-15-R6656 1 Scraper O-ring NBR 10.5

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111

A

14 64 22 18 ANA1-03 3/8 35 22 84 25 21 ANA1-04 1/2 60 36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

23 3.4 6.2 3.2 15 11 Most sensitive position 8.5 1308 Water Resistant 2-Color Indication Type Solid State Auto Switch: Tie-rod Mounting Style D-F5BAL Refer to SMC website for the details of the products conforming to the international standards.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

(Refer to pages 15-6-3 to 15-6-5 for details.)

Mini Free Mount Cylinder

Standard Stroke Unit: N Bore size (mm) Action Standard stroke (mm) Stroke (mm) Bore size (mm) Spring condition 12 5 10 5, 10, 15, 20 25, 30 16 6 3.5 Pre-loaded Double acting 12 9.5 9.5 Loaded 5, 10, 15, 20, 25 30, 35, 40, 45, 50 20 4.5 Pre-loaded 7.5 16 12 Loaded 11 11 Single acting, spring return 5, 10 16 10.5 5.5 Pre-loaded 20 20 16.5 16.5 Loaded Moving the load with the thrust (spring

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Class LQ2 2 3 4 5 LQ1 11 12 13 14 15 16 1 2 3 4 5 6 Packaging Nil 1 Clean packaging Class M3.5 Standard packaging Class M5.5 Nut insert bushing LQ U 03 2 The U type is recommended when changing tubing sizes.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15 23f8 17 25 5.5 M24 x 1.5 1/8 81 11 3.5 5.5 143 M10 x 1.25 15 25f8 17 32 7.5 M30 x 1.5 1/8 87 13 3 4 159 M14 x 1.5 15 31f8 18 40 7.5

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

10

Q F G1/2 23 Y C R E C R (1.5) (1.5) Y E B1 B A B1 B A 2 x P Port size 2 x P Port size Terminal part U W M U W M Flat terminal connector 250 Series X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole 11 9 6.5 15 (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

HRX-OM-I051

8.1.3 Communication specification. 8-12 8.1.4 Alarm signal selection . 8-14 8.2 Outer Dimensions . 8-15 8.2.1 Part 1 . 8-15 8.2.2 Part 2 . 8-15 8.2.3 Part 3 . 8-16 8.3 Flow Chart . 8-17 8.3.1 Part 1 . 8-17 8.3.2 Part 2 . 8-18 8.4 Offset Function . 8-19 8.4.1 Example of offset function . 8-20 8.5 BAND/READY function . 8-22 8.6 Anchor Bolt Mounting Position . 8-23 8.6.1 Part 1 . 8-23 8.6.2

JXCx-OMT0002

JXC-OMT0002-C 4.3 Parts Description Detail of the controller parts. (1) (9) (10) (2) (3) (4) (15) (16) (7) (11) (8) (12) (5) (17) (18) (21) (19) (6) (20) (13) (14) No.

Stainless Steel 316 Fittings

(mm) 3.2 4 6 8 10 12 16 Note 2) Effective area (mm2) 2 x Applicable tube H (Width across flat) 12 12 17 19 21 24 30 T (M) Mounting hole M Weight (g) L Model T H KQG2E23-00 KQG2E04-00 KQG2E06-00 KQG2E08-00 KQG2E10-00 KQG2E12-00 KQG2E16-00 3.4 5.6 13.1 26.1 41.5 58.3 113 14 14 25.8 30.4 40.3 49.9 87.3 11 11 15 16 19 21 28 32.2 32.4 33.6 36.4 37.2 39.2 42.6 12 12.6 13.6 16.1 17 18.6 20.8 M10