ISO Standard Hydraulic Cylinder

16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800 96 147 47.5 95.5 10.5 M33 x 2 14 60 42 17 18 121 1/2 74 133 77 13 80 75 45 41 17 41 45 100 25 to 1000 115 179

15

The bore size is 20, so the maximum load for vertical mounting will be 11 kg. Work load is 5.5 kg < 11 kg. OK The cylinder is mounted in the vertical direction, and the load generates no rolling moment, so there is not restriction.

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Manifold Specifications

136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216

PFxx-OMX0002

Characters Number of digits 1 2 3 4 5 6 7 8 9 seg 11 seg 7 seg 7 seg 7 seg 7 seg 11 seg 7 seg 7 seg 7 seg : 1st. and 6th. digits are displayed in 11 seg. Others are displayed in 7 seg. Character for 7 segment display Character changes as below by pressing the or button.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750 kPa 750 kPa Number of needle rotations Number of needle rotations Number of needle rotations 14 PF2M7(-L) Series Flow Rate Characteristics at Negative Pressure (Reference Data) When the PF2M series is used with negative pressure (70 to 0 kPa), the measurable range (warranty range of the specifications

Air Cylinder Series CS1

surfaces Same surface 35 100 110 150 2 110 + 30(n2) (n = 2, 4, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces

AZ1000

However under Japanese regulation, only MPa is available in Japan. 40 Specifications 1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect.

Precautions 1

Refer to front matters 42 and 43 for Safety Instructions, pages 3 to 11 for Actuator and Auto Switch Precautions and 3/4/5 Port Solenoid Valve Precautions in Best Pneumatics No. 1.

Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Cylinder with Lock Series CLS

150 Same surface 110 + 30 (n2) (n = 2, 4, 6, 8) 150 + 30 (n2) (n = 2, 4, 6, 8) 35 + 30 (n2) Different surfaces D-A44 110 + 50 (n2) (n = 2, 4, 6, 8) 150 + 50 (n2) (n = 2, 4, 6, 8) 55 + 55 (n2) Same surface 15 1 pc. 110 150 2 pcs.

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

7ND9071en

CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

HRL

(including 6 M8 bolts)*7 Weight (dry state)*11 kg Approx. 240 Approx. 260 Approx. 330 *1 Use fluid in condition below as the circulating fluid.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

Direct Solenoid

oN Opd.tion: 360 it60 131) 130 360 360 130 150 150 r5n 150 1 1 0 150 150 i $'q (46.C) (4.5) 0,177 t'r.5) (10) 0.39,1 ool (5) (5) .) 0346 19.81 0.543 03.31 03.q M6di4 air {lub.i*td d 0ll.16}, .nd non.flflm.blo mn.torlci non{orcs!.

Compact Guide Cylinder Series MGQ

11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.