Fluoropolymer Piping Equipment

LQ1T31-R4 10 3 10 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T31-R7 8 8 10 5.5 LQ1T31-R8 6 6 10 3.6 LQ1T32-R5 6 8 8 3.6 LQ1T32-R6 6 10 10 3.6 LQ1T32-R7 6 6 8 3.6 LQ1T41-R2 12 8 12 5 20 20 20 9 18 17 17 17 36.5 36.5 36.5 23 23 23 5.5 LQ1T41-R3 12 6 12 15 14 33 16.5 3.6 LQ1T41-R5 10 12 12 24 21 43 28 7.4 LQ1T41-R7 10 10 12 7.4 LQ1T41-R11 6 10 12 7 20 20 29 14 28 17 20 17 38.5 23 6

CRB2/CRBU2/CRB1

, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRB2 10 W B 180 S E Standard Connecting port position Size 10 15 Nil E Side ports Axial ports 90 L CDRB2 10 W F 180 S Side ports Axial ports With auto switch Sizes: 10, 15 CDRB2 20 W B 180 S R73 L With auto switch Sizes: 20, 30, 40 Fittings are sold separately.

MY1

20 50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Dual Rod Cylinder Series CXSJ/CXS

) Graph (2) V=300(mm/s) 0.5 0.4 CXSL6 0.05 CXSM6 Mass m (kg) Mass m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) 10 to 32 Graph (3) V=200(mm/s) Graph (4) V=400(mm/s) 4 20 3 10 32 5 25 1 Mass m (kg) Mass m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-GS-1 SY5000-GS-1 SY7000-GS-1 10-SY3000 10-SY5000 10-SY7000 Note) The gasket assembly consists of 10 sets of mounting screws and a gasket. 74 Body Ported 10-SY3000/5000/7000 Type 20 Manifold Specifications 10-SS5Y3-20(-Q) 10-SY320 10-SS5Y5-20(-Q) 10-SY520 10-SS5Y7-20(-Q) 10-SY720 Single base/B mount Common SUP, Common EXH 2 to 20 stations Note 1) Model Applicable valve Manifold type

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Rotary Actuator/Vane Type

10-(18-X) to (X-4) X-4 3 to 18 10-(18-X) to (X-1.5) X-1.5 20 10 to 20 10-(20-X) to (X-4.5) X-4.5 3 to 20 10-(20-X) to (X-1.5) X-1.5 30 10 to 22 12-(22-X) to (X-5) X-5 5 to 22 12-(22-X) to (X-2) X-2 87 CRB2 Series Axial: Top (Long shaft side) Axial: Bottom (Short shaft side) Symbol: A14 Symbol: A15 Applicable to single vane type only.

1

25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Air Cylinder

(mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN 20 18 15.5 13 8 20 12 8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12

MGP

m (kg) 25 16 20 25 16 20 16 16 1 1 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 Stroke (mm) Stroke (mm) 17 l = 50mm V = 400mm/s 18 l =100mm V = 400mm/s 100 50 50 80 100 50, 63 80 50, 63 50, 63 40 50, 63 40 32 40 32 32, 40 32 10 10 25 25 5 5 Load weight m (kg) 20 20 25 16 20 16 25 20 16 1 1 16 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 25 Series MGP Compact Guide Cylinder

15

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10

ZP

ZH 10 10 13 13 ZU Vacuum entry port (Refer to Table (1) for applications.) 16 16 20 20 ZL 25 25 32 32 Table (1) Vacuum Entry/Mounting Thread Diameter ZY 40 40 Mounting thread diameter 50 50 10 to 16 20 to 50 Pad dia.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z + Stroke ZZ + Stroke 6-5-53 54 Series CG1Q With Mounting Bracket Clevis style: CG1DQ Clevis Style 20 to 63 Bore size (mm) Stroke range (mm) CD CX CZ B L RR V TE TF TH CD hole H10 Axis d9 20 25 32 40 50 63 80 100 Up to 200 38 45.5 54 63.5 79 96 99.5 120 28 32 29 33 40 49 60 74 56 64 14 16 20 22 25 30 35 43 11 13 15 18 20 22 18 22 26 32 10 10 10 10 20 20 8 10 12 14 16 18 18 22 5.5 5.5 6.6

Compact Rotary Actuator Series CRQ2

Series CRQ2 Compact Rotary Actuator Rack & Pinion Style/Size: 10, 15, 20, 30, 40 Size Size 10: 17 mm 15: 20 mm 20: 29 mm 30: 33 mm 40: 37 mm 10: 17 mm 15: 20 mm 20: 29 mm 30: 33 mm 40: 37 mm 10: 17 mm 15: 20 mm 20: 29 mm 30: 33 mm 40: 37 mm CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ Rotation 360 type MSZ 360 CRQ2X MSQX MRQ Series Variations Size Page 10 15 20 30 40 Rotating angle 80 to 100 170

24

20 32, 40 50, 63 32, 40 32, 40 25 32, 40 10 10 25 Load mass m [kg] Load mass m [kg] 20 20 5 5 16 25 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] (17) L = 50 mm, V = 400 mm/s (18) L = 100 mm, V = 400 mm/s 50 50 40 100 40 100 80 30 30 80 50, 63 50, 63 50, 63 20 20 40 50, 63 40 40 32 32 32, 40 32 10 10 Load mass m [kg] Load mass

SYJ300/500/700

-3 (M1.7 x 17 Matt nickel plated) Blanking plate Blanking plate P A Manifold gasket Manifold gasket A P P A Manifold gasket SYJ300-5-4 Manifold gasket SYJ300-5-6 Applicable base 10-SS3YJ3-20 Applicable base sub-plate 10-SS3YJ3-41 10-SS3YJ3-S41 10-SS3YJ3-42 10-SS3YJ3-S42 Manifold base Manifold base Applicable base 10-SS3YJ3-20 Applicable base sub-plate 10-SS3YJ3-41 10-SS3YJ3-S41 10-SS3YJ3-

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder