Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 12.7 12.7 7 9.6 17.5 9.3 10.8 28.7 28.6 25.8 25 22.2 17.5 28.7 AS131F-M5-04 AS131F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 20.3 9.3 20.3 28.6 25.8 25 22.2 7 4 9.6 9.3 10.8 9.3 AS131F-U10/32-04 AS131F-U10/32-03 5/32" 10-32UNF 10-32UNF AS131F-M5-06 AS131F-M5-05 3/16" M5 x 0.8 M5 x 0.8 13.5 11.4 21.3 23.3 34.5 16.5 20.6 21.4 31.8 11.6 6 AS131F-U10/32-06 AS131F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 9.6

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

36 132 50 41 200 74 60 230 74 60 271 86 70 22 36 110 180 544 612 873 JIS Symbol 1 4 1 2 2 Construction/Parts/Dimensions ANA1-01 to 06 Sound absorbing Case material (PFV ) End plate Hexagonal flats ANA1-06: PP How to Order Cover ANA1-10 to 20 Sound absorbing material Body Tension bolt End plate A1 03 AN Port size Symbol Connection Port size 1 8 01 1 4 3 8 1 2 3 4 02 03 04 06 10 12 14 20 (

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M3 M5 1/8 4 6 8 N3 N7 N9 10-SYJ3000 Body ported Base mounted 10-SYJ5000 Top 10-SYJ7000 Side 10-SYJ3000 Bottom Side 10-SYJ5000 Bottom Side 10-SYJ7000 Bottom Body ported Type 21P A, B port P port Individual SUP spacer assembly R port Base mounted P port P Type 32P R port A, B port R port A, B port P port Mixed mounting of 3 port valves and 4, 5 port valves Individual EXH spacer assembly

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

Table of Contents

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

SV

SUP spacer 59.5 MAX.14 SV100-05SV100-0645.5 (N7:7) (C6:3.2) 10 (For DIN rail mounting) (7.5) B B B B 109.5 102.9 111.4 118 100.4 91.9 A A A A 90 B A B A B A B A Dimensions are the ones for SV1300--.

LEC-OM02704CN

[0][0]0) OFFONCC-Link 14 39 14 14.5.9 (1) 0()5( 6) (a) [3][3][1][0][1][5]14.4.1 (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][3][2][0][2][5] 14.4.1 (b) 10 16 10 01F5501 (3) [8][2][2][0] [8][2] [2][0] 1EA5 14 40 14 14.5.10 (1) (a) [0][2][0][0] [0][2] [0][0] (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][5][8][0][8][E] 14.4.1 (b) 0 0 32bit 16 () 0 10 1 16 0 11 22

AC Servo Motor Driver

10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 10M[pulse] 1M[pulse] 0 0 10M[pulse] 1M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses) D Bus voltage

Air Cylinder Series MB

model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-A3 D-A44 D-G39 D-K39 D-A9 D-A9V D-A5 D-A6 D-A59W D-F5NTL D-P4DWL CJ1 CJP Bore size A A A A B A B B B B B B B B A A A A CJ2 32 40 50 63 80 100 125 6.5 4 10.5 8 0.5 0 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 10.5 8 0.5 0 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 CM2 7 4.5 11 8.5 1 0 5 2.5 7.5 5 12.5 10 1 0 4.5

E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

VSA4

C [dm3/(sbar)] 12 15 13 15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

voltage Electrical entry Oil-free option Bracket option JSXD51 C N 06 R 1 G None None S F N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD51 Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD61 C N 10 R 1 G None None S F N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD61 Series/ Valve type Body material Seal material



size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-