Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C
Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Mounting: w/o Mounting Option, Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C
Body Size: 30, Thread: F (G), Port Size: 03 (3/8), Mounting: B (w/Bracket), Bowl: Polycarbonate Bowl, Lubricant Exhaust Port: 3 (w/Drain Cock), Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C
Class: Class 2, Tubing Size: 07 (1/4"x5/32"), Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 3 (Packaging Equivalent to Class M5.5 w/PVDF Nut)
Class: Class 4, Tubing Size: 13 (1/2"x3/8"), Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 3 (Packaging Equivalent to Class M5.5 w/PVDF Nut)
Class: Class 6, Tubing Size: 25 [1"x7/8" (ø25 x ø22)], Piping, Thread: 2 (Tube Piping for Tubing Plug), Packaging: 3 (Packaging Equivalent to Class M5.5 w/PVDF Nut)
Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: H (Set Nut for Panel Mount), Specifications: 3 (0.008 to 0.6 MPa Setting)
Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: H (Set Nut for Panel Mount), Specifications: 3 (0.008 to 0.6 MPa Setting)
Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: F (G), Port Size: 04 (1/2), Accessory: None, Specifications: 3 (0.008 to 0.6 MPa Setting)
Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 3 (0.008 to 0.6 MPa Setting)
Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 3 (0.008 to 0.6 MPa Setting)
Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 02 (1/4), Accessory: None, Specifications: 3 (0.008 to 0.6 MPa Setting)
Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Size: 11 (3/8"), Pilot Port Thread: LQ3 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: 3 (Flow Rate Adjustment & By-pass), Option 2: N (for Ammonium Hydroxide)
Wire Length 0.3m, Light & Surge Suppressor), Manual Override: Non-locking Push Style; Latching: Push Lock Type, Vacuum Pressure Switch Suction Filter: EA (0 to -101kPa/NPN Open Collector 2 Outputs, Suction Filter), Vacuum Pressure Switch Unit Specs: M (Fixed SI Unit), Vacuum Pressure Switch Lead Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 3
0.3m, Light & Surge Suppressor), Manual Override: Non-locking Push Style; Latching: Push Lock Type, Vacuum Pressure Switch Suction Filter: EB (0 to -101kPa/PNP Open Collector 2 Outputs, Suction Filter), Vacuum Pressure Switch Unit Specs: M (Fixed SI Unit), Vacuum Pressure Switch Lead Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: K (Check Valve), Fitting (V Port): 3
Model: 2000 (SV2000), Valve Manifold Stations: 3
Model: 3000 (SV3000), Valve Manifold Stations: 3
Model: 1000 (SV1000), Valve Manifold Stations: 3
Model: 4000 (SV4000), Valve Manifold Stations: 3