Compact Cylinder/Guide Rod Type Series CQM

BQ-2 1.5 D-P4DWL BQP1-050 BQ2-012 5 Note 3) Auto switch mounting brackets and auto switches are included when the cylinder is shipped. For only 40 to 100 with D-P4DWL, they are assembled at the time of shipment. BQP1-050 16 Other Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.

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\*t W Weight Table Carcualion (Exampl) NCJ2KL10-050 .Basic weishl-''.44 or (610) rAddilional weight..-11 oz !

COQ2BP

D-PS 050 (M3xO.5xI 4L) Lubrication Non-lube Support typo Standard Switch mounting nul: 1 pc. Spring washer. 2 pes. Cu8hlon Not available Rod .d thread Male lhread (Sid.) Nominal diameter: 3mrn : ~1,,;; Thread tolerance J!S cass 2 Slroke length tolerance (mm) .. 1.0 0 High Magnetic Field Resistance Series CD02BP Distance From Auto Switch Side Face .. > 'y " 50 / Saf.

IDX-OM-W017

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

IDX-OM-W038

. / 3.10.6 PID CH1 PID 050 051 052 PID( [] P 0.1999.9% I 03200 D 0.0999.9 PID PIDPIDPID PID P [] P=10.0%I=100D=20 . 1. PV/SV PV SV 2. SEL CH1(PID 3. SEL CH1(PID PV P SV 4. SEL PV SV 5. 5.010.0 6. SEL SV 7. i() 8. SEL PV 9. 60100 SV . 10. SEL 11. i() SV 12. SEL PV 13. 11.520.0 SV 14. SEL 15. PV/SV SV .

PSxx-OMT0001CN

0.050.30 mm () 1 060 2 10300 2 30500 2 () 1 1 100200 kPa OUT1 OUT2 5 () 3 -20220 kPa 0.005 mm 0.010 mm 0.020 mm (25 ) 0.010 mm 0.015 mm 0.030 mm 0 0 (3) (20) 0200 kPa -20220 kPa / 1 kPa OUT2 6 0.5F.S. 1 digit (25 ) 2F.S. 0 7 600 kPa 1.5 4 5 L/min 12 L/min 22 L/min DC24 V 10(p-p)10() 25 mA 2 (NPN PNP) 10 mA 26.4 V 1 V (10 mA ) 2 LCD 3 7 (/) 6 7 () IP67 8 050

CLK1

Rod size (mm) Piston area (mm) Operating direction Bore size (mm) Auto switch model 0.3 0.4 0.5 0.6 32 40 50 63 241 322 402 482 OUT 804 D-C73, C76, C80 D-C73C, C80C Reed switch 12 32 207 276 346 415 IN 691 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 504 630 756 OUT 1260 Solid state switch 16 40 318 424 530 636 IN 1060 588 784 980 1180 OUT

High Vacuum Angle Valve

-XN1 AS568-050-XP1 AS568-050-XQ1 AS568-050-XR1 AS568-050-XR2 AS568-050-XR3 AS568-050-XS1 AS568-050-XT1 AS568-050-XU1 Symbol Component Parts No. 1 2 2-1 3 4 5 6 Description Material Remarks O-ring Part No.

VS 8-2/VS 8-4

9 y t @0 u Lead wire colors for circular connector cable assembly (AXT100-MC26) 015 030 050 Approx. 10 Terminal no.

C95

) Load voltage Auto switch model Mounting bracket Indicator light Wiring (output) Special function Type Electrical entry Electrical entry direction Applicable load 0.5 (Nil) 3 (L) 5 (Z) AC DC Vertical Lateral Z76 3 wire 5V IC circuit Reed switch 24V Yes 32,40 BMB4-032 Grommet Z73 100V Relay PLC 2 wire Z80 No IC circuit 100V or less 5V, 12V Y59A Y69A 3 wire (NPN) 50,63 BMB4-050

Cylinder with lock

-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 D-Y59/ Y69 D-Y7P/ Y7PV D-Y7W/ Y7WV D-Y7BA D-Z7/ Z80 BMB4-032 BMB4-032 BMB4-050 BMB4-050 BMB4-063 BMB4-063 Stainless steel mounting screw The following stainless steel mounting screw kit (including set screws) is available.

Clamp Cylinder Series CK1

Example case q Built-in standard magnet cylinder: CKG1A50-50Y ... 1 Example case w Magnetic field resistant auto switch: D-P4DWSC ... 2 Example case e Switch mounting bracket: BA8-050 ... 2 Note 1) Please order the same quantity for the switch mounting bracket and the magnetic field resistant auto switch respectively.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Low Profile Slide Table Series MXF

GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) GR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Applied part Guide Cylinder Dimensions: Stroke Adjusting Bolt Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25

IDX-OM-W093

Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2 L3 PE L N PE 3-5 3-5 IDF60/70/80/90 Series 2-1 IDX-OM-W093 () IDF60/70/80/90 Series 2-2 IDX-OM-W093 3 3.1 50kg IDF60/70/80/90 Series 3-1 IDX-OM-W093 3.2 3.2.1 (85%) 245 050

IDX-OM-W026

Series i-4 / i7 IDX-OM-W026 1 1 1-1 OUT IDF22E75E IN (ONOFF ) (EVAPORATING TEMP) 5-2 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30, IDF55E-30, AC200V IDF75E-30 AC200V L N PE L1 L2 L3 PE M3 M3 1.25-3 1.25-3 (6.5mm ) (6.5mm ) IDF Series 1-1 1 1 IDX-OM-W026 1 IDF22E75E OUT IN () IDF Series 1-1 1 2 IDX-OM-W026 2 2 2-1 IDF22E75E 54116kgIDF22E,37E 4 IDF55E,75E 2-2 2 2 1 2000m 240 050

IDX-OM-W014

IN IDU Series i-2 i-5 IDX-OM-W014 i i-3 HFC IDU Series i-3 i6 IDX-OM-W014 i i-4 / 11.5 () [] IDU Series i-4 / i7 IDX-OM-W014 1 1 1 IDU3E6E (ONOFF ) (EVAPORATING TEMP) ( ) 1-1 IDU Series 1 1 IDX-OM-W014 1 IDU3E6E-10AC100V IN OUT AC100V () IDU3E6E-20/23AC200/230V L N PE M3 1.25-3 6.5mm 1-1 IDU Series 1 2 IDX-OM-W014 2 2 1 IDU3E 6E 28kg 2 2 2 2 2 1 2000 240 600mm 050

IDX-OM-W020

1-1 IDX-OM-W020 1 IDFB3E IN : 3/8 OUT : 3/8 () IDFB Series 1 2 1-1 IDX-OM-W020 1 IDFB4E15E (ONOFF ) (EVAPORATING TEMP) IDFB15E IDFB4E11E 1-1 IDFB Series 1 3 IDX-OM-W020 1 IDFB4E15E IN 4E_ : 3/8 6E,8E_ : 3/4 15E_ : 1 OUT 4E_ : 3/8 6E,8E_ : 3/4 15E_ : 1 IDFB Series 1 4 1-1 IDX-OM-W020 2. 2 2-1 IDFB3E15E 45lbs (20kg)3 IDFB Series 2-1 2 1 IDX-OM-W020 2. 2-2 2-2-1 240 050

IDX-OM-W035

i-2 IDFB Series i-6 IDX-OM-W035 i i-3 HFC , IDFB Series i-3 i-7 IDX-OM-W035 i i-4 / 1 1.5 () i-4/ IDFB Series i-8 IDX-OM-W035 1 1 1-1 IDFB22E/37E OUT IN PE () IDFB22E-11N ) IDFB Series 1-1 1-1 IDX-OM-W035 1 IDFB55E/75E OUT IN ( ) 5-2 () 5-2 =M4X10 () IDFB Series 1-1 1-2 IDX-OM-W035 2 2 2-1 110lbs(50kg) IDFB22E,37E 4 IDFB55E,75E 2-2 2 2 1 2000m () 36104 F (240) 32122 F (050