.: Metric size 6, 10, 12, 19, 25; Inch size 1/4", 3/8", 1/2", 3/4", 1", FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER, .69322 lb

Elbow type, speed control with one-touch fitting , Improved, larger push-lock handle, Easy identification of meter-in (blue handle) vs. meter-out (gray handle), Max. operating pressure 1MPa , Applicable tubing material: nylon, soft nylon, polyurethane, SPEED CONTROLLER, FLOW CONTROL, 19 lb

Speed controller with Uni one-touch fittings, Screwing-in time is reduced to 1/3, Contamination inside tubing due to cut, separated, or extruded sealant is nonexistent, Reduction in mounting space, Options: hexagonal lock nut, nickel plated, SPEED CONTROLLER, FLOW CONTROL, 19 lb

Speed controller with Uni one-touch fittings, Screwing-in time is reduced to 1/3, Contamination inside tubing due to cut, separated, or extruded sealant is nonexistent, Reduction in mounting space, Options: hexagonal lock nut, nickel plated, SPEED CONTROLLER, FLOW CONTROL, 19 lb

.: Metric size – 6, 10, 12, 19, 25;  Inch size – 1/4", 3/8", 1/2", 3/4", 1", High purity chemical liquid valve, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, 0.23 lb

Pressure Sensor Controller

No.PS-OMG0002-G PRODUCT NAME Pressure Sensor Controller MODEL / Series / Product Number PSE300 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Mounting and Installation 10 Installation 10 Wiring 12 Internal circuit and wiring example 14 Setting 16 Pressure Setting 19 Other Functions 21 Maintenance 23 Troubleshooting 24 Specification 31

PSxx-OMG0001CN

No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Digital Flow Monitor

Reversed output setting of OUT1 6 Flow setting of OUT1 7 Hysteresis setting of OUT1 8 Delay time setting of OUT1 9 Display colour setting 10 Output mode setting of OUT2 11 Reversed output setting of OUT2 12 Flow setting of OUT2 13 Hysteresis setting of OUT2 14 Delay time setting of OUT2 15 Display colour setting 16 Digital filter setting 17 FUNC terminal function setting 18 Sub display setting 19

IZN10_C

OFF HV LED ON/OFF OFF NDL LED OFF -19- 6. 6. 6. 6. ( ( ( ( ) ) ) ) IZN10-01/IZN10-02 / M3X0.5 4 () 2xM3x0.5 10 -20- 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. ! ( ( ( ( 2 2 2 2 ) ) ) ) LED , , , -21- 7 7 7 7-2. 2. 2. 2. 7-2-1. 7-2-2. 3-1 Assy Assy Assy LOCK ! -22-

Process Pump

Circuit example (1) Circuit example (2) Process Pump 3 port solenoid valve Regulator Process Pump Air filter Air FLUID Bypass Throttle SUP OUT Air supply FLUID Air IN EXH Strainer Silencer Transfer fluid 15 Dimensions 16 Revision 19-Feb-2021 Initial release 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications

Process Pump

Circuit example (1) Recommended Valve Circuit example (2) VQZ240 (Exhaust center) 16 Dimensions 17 Revision 19-Feb-2021 Initial release 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

Process Pump

Outer dimensions . 19 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

PAB-OM-O003

Outer dimensions 18 2 5/5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved 19

Valve Controller

How to connect 1)Switch contact, relay contact output Fig. 17 Temporary stop operation: Switch / relay contact OFF Re-Start Operation: Switch / relay contact ON 2) Transistor output Fig. 18 Temporary stop operation : Transistor OFF Re-Start Operation: Transistor ON 3) Open collector output Fig. 19 Temporary stop operation: Open collector OFF Re-Start Operation: Open collector ON 7-2 When

Valve Controller

DIP switch as shown below. 1 2 3 Operating conditions: OFF ON OFF Temporary stop Fig. 16 .How to connect (1)Switch contact, relay contact output Fig. 17 Temporary stop operation: Switch / relay contact OFF Re-Start operation: Switch / relay contact ON (2) Transistor output Fig. 18 Temporary stop operation : Transistor OFF Re-Start operation: Transistor ON (3) Open collector output Fig. 19

High Vacuum L Type Valve

TY 1st printing: SU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 19 XL-OMS0001-B

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMV0017 Revision history 1st printing: VZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 19 XL-OMV0017

XLA Series

Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption for 0.5MPa 19

XLA- ∗ -F7NJ ∗ - ∗ Series

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19

XLGR Series

Perform final torque with same numerical order. 18 XL-OMP0001 Revision history 1st Printing :PR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved 19 XL-OMP0001