2/3 Port Valve for Various

Series VXR21/22/23 Dimensions Normally Closed: VXR210/220/230 Normally Open: VXR212/222/232 Grommet: G Port size Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 59 60 60 Port size P Rc N Q L K J H F E A B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

CG1

Note) ( ): Long stroke 1.6-8 Standard: Double Acting Single Rod Series CG1 With Mounting Bracket Axial foot (mm) Z ZZ Bore (mm) LT W X B LC LD LH LS LZ M LX Y Without rod boot With rod boot Without rod boot With rod boot 67+l 74+l 75+l 83.5+l 95.5+l 95.5+l 104+l 104+l 20 25 32 40 50 63 80 100 10 10 10 10 15 15 16 4 4 4 4 5 5 6 6 6 6 45 (53) 3 3 3 3 34 20 44 49 58 71 86 3 32 36 44 54 66 82

AC Servo Motor Driver (Pulse input type/Positioning type)

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. *4.

20

Material Applicable blow gun model Model 6 copper extension nozzle Nozzle type P5670129-11 P5670129-11F HNBR Fluororubber VMG1mm-m-31 to 38 10 22 VMG1m-mm-31 to 38 5 Blow Gun X35 with extension and high efficiency nozzle Series VMG How to Order VMG 1 1 02 X35 W A Piping entry Nozzle Bottom 1 Nozzle part no.

MU

Snap ring m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part No.

Wedge Cam Operation Provides

point L(mm) MHY2 W MHKL2-25S MHKL2-25C MHW2 M 100 100 MRHQ 80 80 Holding force (N) Holding force (N) L Pressure 0.6MPa Auto switch 60 60 Pressure 0.6MPa 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa 0.3MPa 0.3MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L(mm) Holding point L(mm) 2.4-11 Series MHK2 Dimensions MHK2-12l/Standard model 9 2-M3 X 0.5 thread depth 4 (Mounting thread) 15 3H9

JA/JAH/JB/JS

e r t No. q w e r t y Note Stud Case Ring Socket Dust cover Note Stud Case Ring Cap Dust cover Set screw MQQ M RHC MK(2) Basic Style: JB RS Q G JB12, 16 Center of sphere RS H A RZQ MI W S CEP1 CE1 R CE2 JB20 to 160 Center of sphere ML2B C J G5-S CV MVGQ CC RB R J (mm) DMaximum operating tension and compression force (N) Applicable bore size (mm) M A Maximum thread depth P Model Center of

JA/JAH/JB/JS

e r t No. q w e r t y Note Stud Case Ring Socket Dust cover Note Stud Case Ring Cap Dust cover Set screw MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Basic Style: JB RS Q G JB12, 16 Center of sphere RS H A RZQ MI W S CEP1 CE1 R CE2 JB20 to 160

PF2D

L/min Accumulated pulse flow rate exchange 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse value (Pulse width: 50ms) Note 1) Note 2) Real-time flow rate L/min, gal (US)/min Display units Accumulated flow L, gal (US) Accumulated flow range Note 1) 0 to 9 L 2.5% F.S.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Plug-in/Plug Lead: Single Unit

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

and table moved to the end of the stroke W Horizontal load 100% Horizontal load 50% 200 100 Amount of deflection m 50 Load point distance Figure 1.

Rotary Actuator NCRA1 Series Single Rack and Pinion

q NC G RA1B with Auto swllch cap"ou,O J T With Auto Swllch Capsbiliry J | | D-withbuin-inmasner J I &-*"-l See above Bor See above ,f The stsrda|d liead wire length is 18 inches. "L' is addecl for 10loot long lead wire. E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NcRAl/n".x and Pinion ryp Symbol \ -D \ l ?

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

SI Unit for Vacuum Manifold

Vendor defined parameters Index(dec) Subindex Access Parameter name Size[byte] Data Storage Section 0x0040(64) 1...16 R/W Pressure P1 2 Y 3.4.1 0x0041(65) 1...16 R/W Hysteresis H1 2 Y 3.4.2 0x0042(66) 1...16 R/W Pressure P2 2 Y 3.4.3 0x0043(67) 1...16 R/W Hysteresis H2 2 Y 3.4.4 0x0044(68) 1...16 R/W Pressure P3 2 Y 3.4.5 0x0045(69) 1...16 R/W Hysteresis H3 2 Y 3.4.6 0x0046(70) 1...16 R/W

Vacuum Filter AFJ Series

Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

DOZ is not available. 2 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector DO: