SMC Wireless System EtherNet/IP ® compatible

Signal name 1 24 V (Output) 1 24 V (Output) 2 0 V (Output) 2 0 V (Output) 3 24 V (Control and input) 3 24 V (Control and input) 4 0 V (Control and input) 4 0 V (Control and input) 5 Not used -89No.EX-OMU0028-D Regarding the 2 types of power supply The power supply consists of two power supply systems as follows: Power supply for control and input: Supplying power for control of each units

PFxx-OMU0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 71 No.PF-OMU0002-D Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

SMC Wireless System PROFINET compatible

Signal name 1 24 V (Output) 1 24 V (Output) 2 0 V (Output) 2 0 V (Output) 3 24 V (Control and input) 3 24 V (Control and input) 4 0 V (Control and input) 4 0 V (Control and input) 5 Not used -100No.EX-OMW0006-D Regarding the 2 types of power supply The power supply consists of two power supply systems as follows: Power supply for control and input: Supplying power for control of each units

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Membrane Air Dryer

D-DN

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Vacuum Pad

V A12 M12 x 1.75 V V AG1 G1/8 V V AG2 G1/4 V V AG3 G3/8 V V Male thread Pad material Symbol Material B5 M5 x 0.8 V V B8 M8 x 1.25 V V Female thread SF Silicone rubber Complies with the FDA (USA Food and Drug Administration) 21CFR177.2600 elution test.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Fieldbus system Digital unit

2 Output 4 2 3 0 V (Output) 24 V (Output) 4 Output 5 1 0 V (Output) 24 V (Output) 2 Output 6 3 3 0 V (Output) 24 V (Output) 4 Output 7 1 0 V (Output) 24 V (Output) 2 Output 8 4 3 0 V (Output) 24 V (Output) 4 Output 9 1 0 V (Output) 24 V (Output) 2 Output 10 5 3 0 V (Output) 24 V (Output) 4 Output 11 1 0 V (Output) 24 V (Output) 2 Output 12 6 3 0 V (Output) 24 V (Output) 4 Output 13 1 0 V

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

42

) V V CC-LINK V D side U side 1 2 3 Stations SI Unit Part No.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

Solid State Auto Switch

The load doesnt work. < Auto switch operating range [mm] / Actuation operating speed [mm/s] -22No.D-S-OMJ0004-G Specifications D-M9B(E)(V)/D-M9N(E)(V)/D-M9P(E)(V) PLC: Programmable Logic Controller Switch part no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

OUT2 A NPN NPN B PNP PNP C NPN Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

EXxx-OMS0026CN

3PLC / / 0..10 V 0.00+10.45 V +0.05+10.50 V 0.00+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 0.00+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V +0.75+5.25 V 0..20 mA 0.00+20.90 mA +0.10+21.00 mA 0.00+21.00 mA 4..20 mA +3.00+20.90 mA +3.10+21.00 mA +3.00+21.00 mA /(E.O.

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

IDG

AMH-CA350-D AMH-CA450-D IDG60M GC30-10 Pressure gauge (Type V only) Replacement Parts (Mist separator, Micro mist separator, Element for micro mist separator with prefilter) Model Description AFM20 AFD20 AFM30 AFD30 AFM40 AFD40 AMH350 AMH450 Element assembly AMH-EL350 AMH-EL450 630611 63092 630617 63093 630623 63094 Please refer to pages 14-19-28 to 14-19-29 for the replacement parts of a