Attach the included filter cover and air filter (hook the protruding part of the filter cover on the product) and tighten screws to the required torque (M3: 0.63Nm). [] key (UP key) Increases set data. [MODE] key Used to change screens and modes.
Signal 1 Thermostat + 2 Thermostat 3 RTD sensor terminal A (internal temp. sensor) 4 RTD sensor terminal B (internal temp. sensor) 5 RTD sensor terminal B (internal temp. sensor) 6 Leak sensor +24V 7 Leak sensor signal input 8 Leak sensor 24VE Signal connector 9-10 Unused Earth FG 4) Terminal block HED003-C2*, HED005-C2*, HED007-C2* MORIMATSU: M111A-7A, Fixed screw M3 Connection cable; 22AWG
Step 3 Preparation2 Step 4 Body assembly 3 3 Bolt 1 2 Bolt size, Tool, Tightening torque of bolt (Nm) Valve seal 1 2 1 Bolt size valve Hex Tightening torque wrench size 16 M3 3 0.7 4 4 25 M5 4 1.5 40 M6 5 2.5 Bonnet 50 M8 6 6.1 assembly 63 M10 8 15 80 Body [For XLA-] Pilot port 0.4 MPa [For XLC-] Air should not be applied.
Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Pilot port Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening size wrench torque XLF-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 -63 M10 8 15 -80 Body Supply air pressure of 0.4MPa (G) to the pilot port.
80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3
XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3
Table 4 Inner cover fixing screw tightening torque[Nm] Model Screw size Tightening torque CYV15 M3 x 0.5 0.3 CYV32 M6 x 1 2.45 Sine suction mechanism is installed as a standard specification. However, cushion effect adjustment is not available. 7. Maintenance (1) Do not disassemble the cylinder tube, linear guide, slide table and other components.
. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3. CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4.
Size 10 Size 15 P211070-10 P211090-10 Stainless Hexagon socket set screw Stainless 3 Hexagon nut steel 1 M3 3 steel 1 M33L Cross recessed round head screw Stainless Cross recessed round head screw Stainless 2 steel 2 M34L 2 steel 3 M312L Stainless Aluminum steel 1 1 Joint alloy 1 Chromated 1 Joint No. Description Material Qty Note No.
Bolt size for mounting on axial direction Bolt Size Mounting on the top Mounting at bottom Bolt Tap depth When using body tap When using body through hole 1 M30.5 3.5 M40.7 M3 2 3 M50.8 M4 7 M40.7 4.5 Table 6.
MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1. 2. 3. 8 - 3. 4. 10 2 16 2 1 <> : AS1211F-M3
. <> AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 2. 4. 1. () 2. 5 3. 4. 5 10 2-5 1.
Model Bolt Max.tightening Torgue (Nm) JMHZ2-16D M3 x 0.5 0.59 Attachment 16 - How to Mount Air Gripper Adjust the robot arm position before mounting so that the mounting is easy. (1) Mounting to the robot arm (2) Mounting of the cover Take care not to get the switch cable Caught when mounting the cover.
H 9 - 3-5. () P13P14P15 5 4 M6 85.8L 4 4 4 M3 27 17 10 - 3-6. M8 8 P .18 M8 8 () NPN PIN 1 +24V DC24V 2 3 4 5 ON/OFF 6 ON/OFF 7 8 GND DC0V M8 2 M8 1 11 - 3-7. Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1.
INP 1 INP ON 0.50 -35- 6.3 0.1mm [Nm] mm LEF16 M4x0.7 1.5 6 LEF25 M5x0.8 3.0 8 LEF32 M6x1 5.2 9 LEFS40 M8x1.25 12.5 14 A A mm) mm LEF16 M3 3.5 20 LEF25 M4 4.5 24 LEF32 M5 5.5 30 LEFS40 M6 6.6 31 40mm 6.4 6 /1000km /500 -36- 1. 2. 3. 1. 2. a. b. c. d.
Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.
( AN R ) 1,000 1,000 ISOclass4 ISOclass4 100 100 30/mi n( AN R ) 10 10 70/mi n( AN R ) 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particl diameter[m] Particl diameter[m] 4 - 11-LEJS63* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 ISOclass7 10,000,000 10,000,000 ISOclass8 ISOclass8 ISOclass6 1,000,000 1,000,000 ISOclass7 0/mi n(ANR) Particl concentration[Particls/m3
Refer to the table below Bolt pull Model Belt Pull tension Model Bolt size Tightening [N] Part number torque [Nm] EQY25 LE-D-1-3 19.6 EQY25 M3 0.6310% EQY32 LE-D-19-4 49.0 EQY32 M4 1.510% "Pulley plate" is installed.
Inner cover fixing screw tightening torque[Nm] Model Screw size Tightening torque CYP15 M3 x 0.5 0.3 CYP32 M6 x 1 2.45 Sine suction mechanism is installed as a standard specification. However, cushion effect adjustment is not available. 9/11 8. Maintenance (1) Do not disassemble the cylinder tube, linear guide, slide table and other components.
INNER VALVE(B) LOCK NUT (261020) INNER VALVE (A) (M3) (26102) 251 INNER VALVE Assy (26100-6) -8- 7.Countermeasures for failure ! Warning Avoid use when failure is not solved. Phenomenon Cause Countermeasures Dust attach supply port or exaust port Disassemble and clean. (If flawed, replace the part.)