2/3 Port Valve

510 650 400 540 400 540 400 540 510 650 510 650 590 730 1.7 1.5 2.0 1.5 1.2 1.2 1.0 5.0 2.5 3.0 3.0 3.0 1.7 2.0 0.4 0.2 0.45 0.2 0.2 0.15 0.45 4.5 0.61 11 0.6 0.35 0.75 0.35 0.35 0.3 0.75 1/4 (6A) 0.85 0.9 1.0 0.9 0.55 0.85 1.0 0.35 0.15 0.4 0.15 0.2 0.1 0.4 6 1.05 19 0.55 0.3 0.5 0.35 0.35 0.3 0.5 Water oil air 1.0 Steam 0.5 0.13 0.08 0.15 0.08 0.1 0.08 0.15 8 1.7 31 0.17 0.2 0.2 0.2 0.14

0.55

650 2 3 (OUT EXH) 280 310 330 650 670 670 3 4 1 4 VP3165 1 2.0 1 1 4 1 1 4 1 VP3185 2.8 1 2 1 2 2 For grommet Conduit terminal +0.2 kg 1496 Large Size 3 Port Solenoid Valve Series VP3145/3165/3185 Construction/Internal Pilot As in the figure below, this pilot-operated solenoid valve consists of a compact 3 port solenoid valve as the pilot valve and a large 3 port valve as the main valve

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650

Escapements Series MIW/MIS

165 142 118 94 236 147 98 OUT 344 295 245 196 491 25 10 124 82 IN 288 247 206 165 412 241 161 OUT 563 482 402 322 804 32 12 207 138 IN 484 415 346 276 691 Mass Standard Stroke Double finger type/MIW (mm) Increase by stroke adjuster (g) Increase by scraper (g) Model Model Stroke (mm) Mass (g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 10 650

Low Profile Air Gripper Series MHF2

sides) mm Note 2) Mass (g) Effective gripping force per finger N Action Model Finger open side Finger close side MHF2-8D MHF2-8D1 MHF2-8D2 MHF2-12D MHF2-12D1 MHF2-12D2 MHF2-16D MHF2-16D1 MHF2-16D2 MHF2-20D MHF2-20D1 MHF2-20D2 8 16 32 12 24 48 16 32 64 20 40 80 0.6 1.0 1.9 1.6 3.0 5.8 4.1 7.4 14.0 7.3 13.7 26.6 0.7 1.1 2.0 1.9 3.3 6.1 4.9 8.2 14.9 8.7 15.1 28.0 65 85 120 155 190 275 350 445 650

24

130 195 260 325 390 455 520 585 650 -XC92 Dust resistant actuator *1 40 14 OUT 1257 251 377 503 628 754 880 1005 1131 1257 *1: The shape is the same as the current product.

Clean Air Module

SF Pressure outlet port assembly 2 LVB3-2 LVB4-2 Without flow adjuster LVB2-3 LVB4-3 ON/OFF valve assembly/ Air operated valve SFD 3 With flow adjuster LVB2-3-1 LVB4-3-1 ON/OFF valve assembly/Manual operation valve LVB2-3-2 LVB4-3-2 LLB LLB Restrictor assembly 4 LVB2-4 LVB4-4 LVB3-65 to 100 L/min With L-type connector With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650

Multi-Axis Step Motor Controller

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 600 g (Screw mounting), 650

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Kit: Lead wire 50 620 1 to 8 stations S Kit: Serial transmission 35 650 Note 1) One-touch fittings in inch sizes are also available. Note 2) Can be changed to side ported configuration. Note 3) An optional specification for special wiring is available to increase the maximum number of stations.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

245 196 491 25 10 CE1 124 82 IN 288 247 206 165 412 241 161 OUT 563 482 402 322 804 32 12 CE2 207 138 IN 484 415 346 276 691 Weight Standard Stroke ML2B Unit: g Double finger type: MIW C J G5-S (mm) Increase by stroke adjuster Stroke (mm) Weight (g) Increase by scraper Bore size Stroke Model Model CV 8 12 20 25 32 8 mm 3 6 110 8 MIW8-8D 12 mm MVGQ 20 mm 5 10 240 12 MIW12-12D 25 mm 10 30 650

Electric Actuator/Slider Type

Additional weight with lock [kg] 0.7 Series LEFS40 V8 Stroke [mm] 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 5.92 6.20 6.48 6.75 7.05 7.35 7.61 7.90 8.17 8.35 8.73 9.00 9.30 9.55 9.86 10.15 10.42 10.70 Additional weight with lock [kg] 0.7 14 Series LEFS Construction !

Ionizer

NDL CHECK 650 A Ionizer Series IZS31 Model Selection and Settings 1/Sensing DC Mode 9) Alarm Alarm item Description Corrective actions Gives notification of the occurrence of an abnormal current, such as a short circuit of the emitter. The ionizer stops ion emission, turns on the HV ALARM indicator, and turns OFF the error signal (OUT3).

•

Rad dia i 1> 2 . 4 I 1>6 I>a 1>10 1>1~ 'A,dsciPtjOQ ~rea {cm2) 0.031 0.126 . 0.283 0.503 0.785 1.33 UOIt kgf -650, 0.028 0.111 0.250 0.444 0.694 1.17 -~ 0.026 0.102 0.231 0.410 0.641 1.08 -55<1. 0.023 0.094 0.211 0.376 0.587 0.99 ~\1acliVm -SOQ 0.022 0.085 0.192 0.342 0.534 0.90 .. , JrEt~l!J'e 450!

VQ7-6/7-8

position) 59 62 94 80.5 139 14 12 4-Rc1/8 (pilot pressure exhaust port) PA PB P R2 R1 67 40 (41.5) 38 (27) 6-Rc1/2, 3/4 1 5 3 SMC 32 (35) 32 (35) 35 35 L: Dimensions Fomula L n 10 9 8 7 6 5 4 3 2 1 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n +1 06 L1 624 568 512 456 400 344 288 232 176 120 Rc1/2 L2 640 584 528 472 416 360 304 248 192 136 L1 650

Guide Cylinder Series MGG

700st MGC 2 600st 400st 500st st: Stroke (mm) MGF 1 100st 200st 300st 0 MGZ 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGT MGGM 100Stroke 8 (Slide bearing type) 7 6 Deflection Y (mm) 1300st 5 1200st 4 1100st 1000st 3 900st D800st 2 600st 700st -X st: Stroke (mm) 400st 500st 1 100st 200st 300st Individual -X 0 0 50 100 150 200 250 300 350 400 450 500 550 600 650

S Couplers

It is possible to achieve a large cost reduction when looking at the effect on a factory scale. 5,000 Conventional couplers Series KK13 Annual cost reduction effect (1,000 yen) S couplers Series KK130 0 Quantity of S couplers used in a factory (pcs.) 500 1,000 1,500 2,000 Air consumption of whole factory (m3/hr (ANR)) 3,600 7,200 10,800 14,400 Compressor capacity of whole factory (kWh) 650

0.55

(462) VF5;44-02 1/4 8.1 0.35 2.1 7.4 0.33 1.9 Exhaust center 578 (390) 650 (462) [7.4] [0.34] [1.9] 3-position 8.0 0.35 2.1 Pressure center 5.6 0.31 1.5 578 (390) 650 (462) [2.9] [0.48] [0.85] Single 8.4 0.34 2.2 8.9 0.29 2.3 473 (297) 509 (333) 2-position Double 8.4 0.34 2.2 8.9 0.29 2.3 529 (352) 601 (424) Closed center 7.3 0.34 2.0 7.1 0.28 1.8 566 (390) 638 (462) VF5;44-03 3/8 14.0 0.26

Proposals for Energy Saving

The switching plate enables conversion to N.C. or N.O. without changing ports. 36.1 2 EXT IN OUT 5.0 7.2 90 130 12.8 15.6 230 280 15.6 31.7 36.1 570 650 5.6 8.9 100 160 1.5 17.2 18.3 310 330 36.1 6.1 11.7 110 210 Cv factor 17.2 280 310 2.0 37.2 650 670 2.8 37.2 650 670 OUT EXT IN OUT OUT EXT Effective area mm Weight kg Note) Can be used in vacuum or with low pressure External pilot type

CY1

Example) for CY1S25 650 (1) Maximum load weight = 20kg (2) Load weight for 650st = 13.6kg 13.6 (3) = = 0.68 is the result. 20 Calculation formula for (1) ST: Stroke (mm) Maximum load weight (center of slide block) (kg) Bore size (mm) 6 10 15 20 25 32 40 CY1S6 CY1S10 CY1S15 Model Max. load weight (kg) 1.8 3 7 12 20 30 50 10 (0.861.3x103xST) 3 10 (1.51.3x103xST) = Stroke (max) 1 to 300st

Compact Cylinder

JIS Symbol Theoretical Output OUT IN Unit (N) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Size 0.3 0.5 0.7 236 IN 71 118 165 20 10 314 OUT 94 157 220 412 IN 124 206 288 25 10 491 OUT 147 246 344 650 IN 195 325 455 32 14 804 OUT 241 402 563 1103 IN 331 552 772 40 14 1256 OUT 377 628 879 Standard Stroke Unit (mm) Size Standard stroke 20, 25 5, 10, 15, 20, 25