V100 VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2005 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing IO printing JP 120DN Printed in Japan.
H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20-6-A14 84 139 88 143 50 ZPYB10--A10 62.5 63 68 102 23 96.5 97 ZPYB30-6-A14 94 149 98 153 ZPYB20--A10 137 142 74.5 75 80 136.5 51 ZPYB50-6-A14 114 194 118 198 75 ZPYB30--A10 5 1.8 14.5 7 2.5 16.5 147 152 84.5 85 90 146.5 ZPYB40--A10 183 188 94.5 95 100 182.5 77 ZPYB50--A10 104.5 192.5 105
Refer to the order made section on page 105 for details. New New ew ew Uses two linear guides.
.: 4 and 5/32" M5 x 0.8 (A, B port) 15 Stations n L1 L2 3 50 42 6 81.5 73.5 8 102.5 94.5 10 123.5 115.5 4 60.5 52.5 5 71 63 7 92 84 9 113 105 11 134 126 12 144.5 136.5 13 155 147 14 165.5 157.5 15 176 168 16 186.5 178.5 17 197 189 18 207.5 199.5 19 218 210 2 stations 39.5 31.5 20 stations 228.5 220.5 512 10-SYJ3000 Manifold specifications Type 46 manifold: Side ported / 10-SS5YJ3-46Stations
of Greene, Tweed Technologies, Inc. 11 Aluminum High Vacuum Angle Valve XLF/XLFV Series Specifications Model XLF(V)-16-2 XLF(V)-25-2 XLF(V)-40-2 XLF(V)-50-2 XLF(V)-63-2 XLF(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLF 5 to 60 (High-temperature type: 5 to 150) XLFV 5 to 50 Operating pressure [Pa(abs)] 1 x 105
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35
with AMC810-14 installed) ( 105 with AMC810-14 installed) 118 (135) 159 (172.5) (105 with AMC810-14 installed) (= 105 with AMC810-14 installed) 159 (172.5) 158.7 158.7 3/4" 1(P), 5(R1), 3(R2) port 3/4" 1(P), 5(R1), 3(R2) port 2 x G1 (Electrical entry) 12 21 47.5 47.5 36 21 4.4 4.4 12 1/8" PE. port 29.5 29.5 29.5 29.5 1/8" PE. port 83 Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum
L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17
Selection example) Based on the graph shown on the right side, Required force: 105 [N] Therefore, the LES25K is temporarily selected. This set value of pushing force is 40 [%].
30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105
(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65
through 2 x 2-11 counterbore depth 6.5 (8H7 hole pitch) 8H7 depth 6 +0.015 0 4 positions for set screws for fixing shock absorbers (M5) 4-M8 x 1.25 thread depth 15 +0.012 0 8H7 depth 12 (mm) 2-Rc 1/8 Plug (R 1/8) (Cylinder port) Model ZZ 254 304 354 404 454 504 554 Z 214 264 314 364 414 464 514 SS 162 187 212 237 262 287 312 S 52 77 102 127 152 177 202 Q 234 284 334 384 434 484 534 P 80 105
(ANR)) Type S 22 38 54 62 84 ZA Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 185 150 ZX Maximum vacuum pressure L: -53 kPa S: -84 kPa ZR Built-in silencer, Manifold exhaust Individual exhaust port Exhaust release (Ejector exhaust) ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment ZMA N.C./N.O.
Roller shaft 22 Nut fixing pin Stainless steel Carbon steel 11 Roller 23 Magnet Synthetic resin 12 Bearing stopper Carbon steel 11 Series LEJS Electric Actuator/High Rigidity Slider Type Ball Screw Drive Dimensions: Ball Screw Drive LEJS40 Body mounting reference plane (160) +0.030 0 5H9 ( ) depth 6 4 x M6 x 1 depth 10 110 Encoder cable (7) M4 x 0.7 depth 8 (F.G. terminal) 18 84 (3.1) 105
Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign object is picked up.
22.6 26.4 Additional weight with lock [kg] 0.4 (Incremental encoder)/0.7 (Absolute encoder) 534 Electric Actuator/High Rigidity Slider Type Ball Screw Drive 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS40 LEF Body mounting reference plane Note 2) 5H9 ( ) depth 6 +0.030 0 (160) 110 4 x M6 x 1 depth 10 LEJ 18 M4 x 0.7 depth 8 (F.G. terminal) 84 105
Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105
Therefore, if an air compressor has a small air delivery, the pressure may not be sufficient. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2004 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing IU printing IU 50DN
Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105