High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

6 6 6 6 3 3 12h9 2 2 2 1.5 4 4 M4 x 0.7 2.1 M4 x 0.7 2.1 M4 x 0.7 2.1 8 8 8 8 8 14h9 5 5 M5 x 0.8 4.3 M5 x 0.8 4.3 M5 x 0.8 4.3 10 2 10 10 10 10 16h9 1 9h9 3 3 3 M3 x 0.5 0.88 1.5 6 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 3 3 12h9 How to Locate Finger and Attachment How to Mount the Attachment to the Finger Finger opening/closing speed: MHR2/MHR3 Positioning in the finger's open/close direction

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

S070

6 barb fitting 1 (SUP) port 16.5 5.5 SYJ 14.5 11.5 6 VK 0.1 W with power saving circuit 1 3 9.5 13.1 VZ 16.5 150 (Lead wire AWG#26) 5 26.5 31.5 3.5 150 (Lead wire AWG#26) VT 33 3.5 2-3.4 Mounting hole VP VG VP P = 7.2 4 7.1 L2 L1 S070 VQ n U side 1 2 3 4 5 D side VKF (11.5) VQZ 9.5 5 VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 7, L2 = n x 7.2 + 15, n: Stations (maximum 20 stations) n L

Modular Type Lubricators Series AL

type Nil N F Rc NPT G When specifying more than one option, please list alphabetically.

Series PF2W Digital Flow Switch For Water

YES OFF n-1 n-2 For Water/High Temperature Fluid Type (For Water) Instantaneous flow rate Display Instantaneous flow rate Accumulated flow Window comparator mode H : Hysteresis L/min L "n" H H ON GPM gal (US) Note 2) Output mode is set to inverted output at the factory before shipment.

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Station 1) (Light/Surge voltage suppressor) Applicable connector: 26 pins MIL type With strain relief (Conforming to MIL-C-83503) 48.5 [55.5] 25.6 5.8 20 Station n L1 L2 Station 4 72.5 64.5 Station 12 172.5 164.5 5 85 77 6 97.5 89.5 7 110 102 8 122.5 114.5 9 135 127 10 147.5 139.5 11 160 152 28.5 1-5-24

Refrigerated Thermo-chiller

6 15/22 18/23 3/4 5/6 9/10 13/14 6/7 13/14 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5

70pvpump

T, F, N are options.

Title not found

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

Smooth Cylinder

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

S070

barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) Stroke (mm) Vacuum entry direction Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 (Rc, NPT, NPTF) 100, 125 25, 50, 75, 100 40 to 80 25, 50, 75 Mounting Connection ZX 40, 50 63, 80 100, 125 0 stroke 6.9 N 11.8 N Full stroke 0 stroke 10 N 15 N Full stroke Thread dia.

Wedge Cam Operation Provides

0.6MPa 40 40 Holding force (N) Holding force (N) 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 Pressure 0.6 MPa Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 6 6 0.4 MPa External grip 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 L Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 Pressure Pressure 0.6 MPa 0.6 MPa Gripping force

HRX-OM-W058

L PE N N For option B PE L PE N L Fig. 3-6 Wiring of power supply cable(Thermo chiller side) 3.3 Installation HRS-R Series 3-12 HRX-OM-W058 Chapter 3 Transport and Setting Up Wiring 1. Connect the power supply cable to the secondary side of the earth leakage breaker and grounding.

Hydraulic Filters

215 215 265 265 265 325 325 130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285