Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 350, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 350, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: With Flat-Blade

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 350, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: With Flat-Blade

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 350, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: With Flat-Blade

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 350, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: Tamper Proof

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 350, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: Tamper Proof

Parallel I/O Type: PNP, I/O Cable Length: 5, Option: Screw Mounting, Type: Cam Follower Guide Type, Size: 25, Motor Mounting Postion: Bottom Mounting, Stroke: 350

Parallel I/O Type: PNP, I/O Cable Length: w/o Cable, Option: Screw Mounting, Type: Linear Guide Single Axis Type, Size: 25, Motor Mounting Postion: Symmetric, Bottom Mounting, Stroke: 350

Parallel I/O Type: PNP, I/O Cable Length: 3, Option: DIN Rail Mounting, Type: Linear Guide Double Axis Type, Size: 32, Motor Mounting Postion: Bottom Mounting, Stroke: 350

Parallel I/O Type: PNP, I/O Cable Length: w/o Cable, Option: DIN Rail Mounting, Type: Linear Guide Double Axis Type, Size: 32, Motor Mounting Postion: Bottom Mounting, Stroke: 350

Parallel I/O Type: PNP, I/O Cable Length: 1.5m, Option: DIN Rail Mounting, Type: Basic Type, Size: 32, Motor Mounting Postion: Bottom Mounting, Stroke: 350

Parallel I/O Type: PNP, I/O Cable Length: w/o Cable, Option: DIN Rail Mounting, Type: Linear Guide Single Axis Type, Size: 25, Motor Mounting Postion: Symmetric, Bottom Mounting, Stroke: 350

Parallel I/O Type: PNP, I/O Cable Length: 5, Option: Screw Mounting, Type: Linear Guide Double Axis Type, Size: 32, Motor Mounting Postion: Symmetric, Bottom Mounting, Stroke: 350

HRX-OM-W004

Switching circulating fluid temperature range rising alarm WRM TEMP OUT OVER / / The monitoring time of communication error / OFF 30 PUMPF 00 Unused Dustproof filter maintenance time*1 5000 / TEMP OUTHI ALARM PUMPF COMM TIME EXT OFSET Output setting of circulating fluid temperature range rising alarm / / / Temp when only pump rus when alarm is generated FILTT FLTR TIME ON 0 PUMPF 350

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Table Displacement (Reference Value) 0.05 W L LEKFS32 (L = 30 mm) 0.04 Displacement [mm] LEKFS40 (L = 37 mm) 0.03 LEKFS25 (L = 25 mm) 0.02 0.01 0.00 0 50 100 150 200 250 300 350 400 450 500 Load W [N] * This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. 9 10 Battery-less Absolute (Step Motor 24 VDC) Battery-less Absolute Encoder: Electric Actuator

Precision Regulator

Supply pressure P1 (MPa) Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) IR1010-01 IR1010-01 IR1010-01 Back pressure: 0.7 MPa Supply pressure: 0.7 MPa 0.4 0.204 0.7 Set pressure P2 (MPa) Set pressure P2 (MPa) Set pressure (MPa) 0.6 0.202 0.3 0.5 Set point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 40 80 120 160 200 0 50 100 150 200 250 300 350

Digital Gap Checker

nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3 m 400 1 m 350

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

1

length when using JT and JCM Product length Reduction Max. 77 mm when using JT Overall Length Comparison JT Series Size JA + CM2 Series JT + JCM Series Reduction rate Workpiece 20 139.5 mm 90.2 mm 35% 32 149.0 mm 96.0 mm 36% 40 189.0 mm 112.0 mm 41% Cylinder (JCM) Weight Comparison JA Series Size JA + CM2 Series JT + JCM Series Reduction rate 20 190 g 102 g 46% Workpiece Cylinder (CM2) 32 350

48

) 50 (40 x 2) 0.05 63 (45 x 2) 80 (56 x 2) 0.04 100 (71 x 2) 100 (71 x 2) 80 (56 x 2) 63 (45 x 2) 100 50 (40 x 2) 40 (32 x 2) 32 (25 x 2) Load mass [kg] 25 (20 x 2) 20 (16 x 2) 10 Plate End Deflection 16 (12 x 2) 12 (10 x 2) Plate end deflection [mm] 1 An approximate plate-end deflection without a load is shown in the graph below. 6 5 Plate end deflection [mm] 0 4 50 100 150 200 250 300 350