Ionizer IZS40/41/42 Series

-X10 Ordering example) X10 X10 IZS 40 IZS 42 1660 1660 10 10 B B Bar length Type 41 42 520 700 760 880 940 1000 1060 1180 1240 1360 1420 1480 1540 1660 1720 1780 1840 1960 2020 2080 2140 2200 2260 2380 2440 Symbol Specifications Contents Model with drop prevention cover The main unit is shipped fitted with a drop prevention cover available as an option. -X14 424

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Long stroke (mm) Bore size (mm) Model Data Slide bearing 20 250, 300, 350, 400 75, 100, 125, 150, 200 MLGCM Auto Switch Mounting Bracket Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

[UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply. 50 50 to to 1000 1000 * Refer to the applicable stroke table. y Motor option Nil Without option B With lock Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

AP500

MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Maximum operating pressure 0.7 MPa Minimum operating pressure 0.05 MPa Auto switch proper mounting position (detection at stroke end) and its mounting height Without auto switch: 10 to 70C (No freezing) Ambient and fluid temperature With auto switch: 10 to 60C (No freezing) Minimum stroke for auto switch mounting Piston speed 50 to 1000 mm/s 30 to 700 mm/s Operating range mm + 1.4 0 Auto

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed Stroke length tolerance +1.4 0 Basic/Axial foot/Rod flange/Head flange Mounting 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Cleanliness class (ISO class) 700

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and mounting height Operating range Auto switch mounting bracket/Part no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to 190)" XC16, XC17 10 X,Z,T, 120 150 15 J,K 220 270 XC18, XC19 Change of rotating range 20 600 700

CYP

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 * Refer to the applicable stroke table. w Size 25 32 40 Applicable Stroke Table : Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700

MY1B

Bore size (mm) Maximum manufacturable stroke (mm) Standard stroke (mm) Symbol Specifications 10, 16 3000 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 XB11 Long stroke type 20, 25, 32, 40 50, 63, 80, 100 XC67 NBR rubber lining in dust seal band 5000 X168 Helical insert thread specifications Strokes are manufacturable in 1 mm increments, up to the maximum stroke

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

(N) 450 270 700 Stroke length tolerance 0 to 12 0 to 16 0 to 11.5 Fine stroke adjustment range (mm) Rc1/8 Front/Side port Rc1/4 Piping port size Backlash 1 mm or less Bottom port 6 8 Manual release Possible (Non-lock type) Made to Order Made to Order: Individual Specifications (For details, refer to page 1221.)

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Cylinder stroke (mm) Port thread type Maximum manufacturable stroke (mm) Bore size (mm) Bore size 16, 20 Symbol Type M thread Rc NPT G Standard stroke (mm) Nil 25, 32, 40, 50, 63 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 3000 TN TF 16, 20, 25, 32 40, 50, 63 Piping The stroke can be manufactured up to the maximum stroke from 1 mm stroke in 1 mm increments

Ionizer Series IZS40/41/42

-X10 Ordering example) X10 X10 IZS 40 IZS 42 1660 1660 10 10 B B Bar length Type 41 42 520 700 760 880 940 1000 1060 1180 1240 1360 1420 1480 1540 1660 1720 1780 1840 1960 2020 2080 2140 2200 2260 2380 2440 Symbol Specifications Contents Model with electrode cartridge drop prevention cover The main unit is shipped fitted with an electrode cartridge drop prevention cover available as an option

Series PF2W Digital Flow Switch For Water

min 1 L/min 0.5 L/min 0.05 L/min 0.1 L/pulse 1 L/pulse 0.5 L/pulse 0.05 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C 5% F.S. 3% F.S. 3% F.S. 2% F.S. 5% F.S. (0 to 50C, 25C reference) Current consumption (No load) Weight Note 2) 70 mA or less 80 mA or less 520 g 460 g 700

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.