Model: 32, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: L (w/Light), Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Model: 32, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Model: 32, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Model: 33, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: B (C37, Seals: EPDM, Class B), Suffix: Z (Oil-free), Port Size: 03 (3/8), Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Magnet: D (Built-in Magnet), Mounting: B (Basic, Double-side Bossed), Bore Size: 40mm, Port Thread: Rc, Stroke A: 150mm, Rod End Thread A: Male Rod End, Rod Boot A: None, +: None, Stroke B: None, Cushion: Rubber Bumper, Rod End Thread B: Male Rod End, Rod Boot B: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT), Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT), Packaging: 1 (Standard Packaging Equivalent to Class

High Vacuum L Type Valve

A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

30

Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore size Maximum thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13 17 22 27 8 9 13 15 0.5 0.5 0.75 1 7 8 11 13.5 21 24

99

Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246

Suction Filter with Case FH99 Series

Tapered thread types (female) conforming to JIS B 0203. 505

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

Thermoelectric Bath

Liquid tank 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size W Water-cooled Radiating method Controller A HEBC002 C Controller Communication A B RS-485 RS-232C 163 Series HEB Specifications (For details, please consult our Product Specifications information.)

Thermo-chiller

The combination of the precise control of expansion valves A, B, and C realizes energy saving operation without waste and high temperature stability.

Heatless Air Dryer ID Series

ID20 ID30 ID40 ID60 Model 80 155 330 780 20 37 85 195 100 192 415 975 Recycled air flow rate Note) (L/min (ANR) Outlet air flow rate (L/min (ANR) Inlet air flow rate (L/min (ANR) Port size (Nominal size B) Weight (kg) 1 4 1 2 1 2 3 4 7 8.5 18.5 25 Supply dry air with a low dew point below 30C. Compact and lightweight without heater and electric control board.

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection. When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch.

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302