Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Series PF2W Digital Flow Switch For Water

min 0.05 L/min 0.5 L/min 1 L/min 0.1 L/pulse 0.05 L/pulse 0.5 L/pulse 1 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C 5% F.S. 3% F.S. 3% F.S. 2% F.S. 5% F.S. (0 to 50C, 25C reference) Current consumption (No load) Weight Note 2) 70 mA or less 80 mA or less 520 g 460 g 700

Rotary Table/

The range of angles within which the shock absorber operates is between the rotation end and the values shown below. 10 20 30 50 Size 7.1 6.9 6.2 9.6 For low energy 8.6 8.0 7.3 10.5 For high energy Weights (g) 10 630 20 30 50 Size 90 specification 2480 1520 1200 Basic type 180 specification 2370 1450 1140 600 90 specification 2810 1750 1390 700 High precision type 180 specification 2690 1680

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

(N) 450 270 700 Stroke length tolerance Fine stroke adjustment range (mm) 0 to 12 0 to 16 0 to 11.5 Front/Side port Rc1/8 Rc1/4 Piping port size Backlash 1 mm or less Bottom port 6 8 Manual release Possible (Non-lock type) Made to Order Made to Order: Individual Specifications (For details, refer to page 1221.)

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) Maximum manufacturable stroke (mm) Standard stroke (mm) Symbol Specifications -XB11 Long stroke 16 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 3000 -XC67 NBR rubber lining in dust seal band 20, 25, 32, 40 50, 63 -X416 Holder mounting bracket I -X417 Holder mounting bracket II Strokes are manufacturable in 1 mm increments, up to the maximum

MY1

Cylinder stroke (mm) Port thread type Maximum manufacturable stroke (mm) Bore size (mm) Bore size 16, 20 Symbol Type M thread Rc NPT G Standard stroke (mm) Nil 25, 32, 40, 50, 63 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 3000 TN TF 16, 20, 25, 32 40, 50, 63 Piping The stroke can be manufactured up to the maximum stroke from 1 mm stroke in 1 mm increments

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Booster Regulator/Air Tank

valve/Pressure gauge set (Supplied with product) Connected to VBA20A, 40A Connected to VBA22A, 42A ARJ Tank IN port Rc1/2 AR425 to 935 Spare port Rc1/2 Booster regulator IN port C Booster regulator IN port C ARX EXH: C EXH: C Spare port Rc1/2 (A) AMR D D (A) (B) (B) OUT OUT 305 Tank OUT port Rc1/2 ARM 216 216 180 4 x 13 4 x 13 50 50 ARP Drain valve 100 100 Drain port Rc1/4 IR-A 200 200 400 700

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch

CV/MVGQ

, 250, 300, 350, 400, 450, 500 40 -XC22 Fluoro rubber seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700

C92

5718 5003 4288 3574 2859 2144 1429 12270 OUT 12270 11040 9820 8590 7360 6150 4910 3680 2450 32 125 11250 IN 11250 10130 9000 7880 6750 5630 4500 3380 2250 20100 OUT 20110 18100 16080 14070 12060 10050 8040 6030 4020 40 160 18850 IN 18850 16960 15080 13190 11310 9420 7540 5650 3770 Note) Theoretical force(N) = Pressure (MPa) X Piston area (mm2) Allowable Kinetic Energy ( ) 3000 2000 1000 700

VZS2000

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series Average speed (mm/s) 800 700 600 500 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

VQ20/30

One-touch fitting for 10 C12: One-touch fitting for 12 LVA LVH LVD LVQ LQ LVN TI/ TIL DIN rail mounting 4-M3 x 0.5 PA PAX PB Formulas L1 = (n 1) x 37 + 56 L2 = L1 10 L3 = L4 10.5 L5 = L1 11.2 Dotted line: DIN rail mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 759 749 775 785.5 747.8 722 712 737.5 748 710.8 685 675 700

Angle Seat Valve

VXB215A D(H). 13 Flow-rate Characteristics Series VXB For Saturated Steam 1.0 Upstream pressure of valve P1 0.9 0.8 1.0 MPa Downstream pressure P2 [MPa] 0.9 MPa 0.7 Critical pressure Subsonic 0.8 MPa 0.6 0.7 MPa 0.6 MPa 0.5 0.5 MPa 0.4 Sonic 0.4 MPa 0.3 0.3 MPa 0.2 0.2 MPa 0.1 0.1 MPa 0 VXB215 A D(H) 100 300 400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at stroke end) and its mounting height Operating range Auto switch mounting brackets/Part no. 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600, 700

Ionizer Series IZS31

Ionizer/Series IZS31 Symbol Specifications Contents X10 460, 540, 700, 860, 940, 1020, 1180, 1340, 1420, 1580, 1660, 1740, 1820, 1980, 2060, 2140, 2220 Non-standard bar length (80 mm-pitch) X14 The main unit is shipped fitted with a security cover available as an option. Model with security cover X15 This model comes fitted with emitter cartridges arranged at a 40 mm-pitch.

MXW

seal R 80 121 161 201 241 281 402 16 8 L 60 91 121 151 181 211 302 R 126 188 251 314 377 440 628 20 10 L 94 141 188 236 283 330 471 R 196 295 393 491 589 687 982 25 12 L 151 227 302 378 454 529 756 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Standard Stroke (mm)/Mass (g) ( g ) Model Standard stroke (mm) 25 50 125 100 75 300 275 150 175 200 250 225 MXW8 550 610 880 790 700

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) D16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 -X 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP 2 5 4 5 Z R D 1 03 M X536 VP 4 1 X538 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20* 2 xed