•

n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O

VS 8-2/VS 8-4

or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

Ejector Valve Unit Series ZYY/ZYX

Y3 X3 ZY -07L Y3 X3 ZY -07S Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100 50 -100 -100 50 -100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) -80 40 -80 -80 40 -80 Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

MXF

100 0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20-75 MXF20-100 MXF20-75 MXF20-50 MXF20-30 0.12 MXF20-30 0.04 0.04 MXF20-50 0.08 MXF20-30 0.02 0.02 0.04 0 0

Digital Flow Switch

OUT1 over current error The switch output (OUT1) load current has exceeded 80 mA. Turn the power OFF and remove the cause of the over current. Then turn the power ON again. OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. An internal data error has occurred. Turn the power OFF and turn it ON again.

Digital Flow Switch (Integrated display type)

mA Max. applied voltage 30 VDC (NPN output) Internal voltage drop NPN output: 1 V or less (at 80 mA) PNP output: 1.5 V or less (at 80 mA) Switch output Response time 1 s or less Repeatability 1%F.S. max. 2%F.S. max.

4-channel Flow Monitor (Remote type monitor unit)

The switch output load current is more than 80 mA (OUT1). Over current error Internal data error. Contact SMC to repair.

Digital Flow Switch (Integrated display type) ( compatible)

. -24No.PF-OMW0010-D Examples of Internal Circuit and Wiring NPN output type PNP output type Max.28 V, 80 mA Internal voltage drop 1.5 V or less Max.80 mA Internal voltage drop 1.5 V or less NPN 2 Output type PNP 2 Output type Maximum 28 V, 80 mA Internal voltage drop 1.5 V or less Maximum 80 mA Internal voltage drop 1.5 V or less Used as IO-Link device : Numbers in the figures show the connector

LFE-OMZ0013

. -15No.LFE*-OMZ0013 Internal Circuit and Wiring examples PNP 2 output type NPN 2 output type LFE0A LFE0B Max.28 V, 80 mA Internal voltage drop 1 V max. Max.80 mA Internal voltage drop 1.5 V max. NPN + Analogue voltage output type NPN + Analogue current output type LFE0C LFE0D Max.28 V, 80 mA Internal voltage drop 1 V max.

CEx-OML0058

1 0 0 80 100 100 80 63 L o a d w e i g h t k g f L o a d w e i g h t k g f I s t h e s p e e d w i t h i n t h e g i v e n r a n g e i n t h e 63 d i a g r a m ? A n d , w i t h i n 50 s p e c i f i c a t i o n s ?

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Fsa Table (9) Allowable shaft load (N) Fr Load direction Fsa Fsb Fr Size 50 490 196 196 63 588 196 294 80 882 196 392 Fsb 100 980 196 588 Point of application of force of Fr is the center of shaft flat face and longer dimension of the key.

Digital Pressure Switch

80 mA -15No.PS-OMH0003-F Connection Connections should only be made with the power supply turned off.

Copper-free Actuators

6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Copper-free Actuators SMC Actuator How to Use This List qRefer to the list below for copper-free products or standard products for each series. tName of CAD file CAD system has file name for using SMC electronic catalog. Refer to p.0-36 to 0-37 for detailed information.

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

IDU/IDF

P-80 (YG)

MGC

M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W V U T S R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14 (2, 4 port) PE port PE port VZS 25 (14 port) 12 VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200