CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

AS

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Also, when exceeding the air cushion stroke ranges on page 1211, the piston speed should be 100 to 200 mm/s. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1211.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Also, when exceeding the air cushion stroke ranges on page 1346, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

Thermo-chiller

INFORMATION Thermo-chiller Air-cooled 460 V Type Standard Type (Pending for UL Standards) How to Order HRS 200 A 46 S Option Cooling capacity Nil None A With caster adjuster-foot 200 20.5 kW Cooling method A Air-cooled refrigeration K1 With uid ll port Pipe thread type 1 This is a manual fluid fill port that is different from the automatic fluid fill port.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Heatless Air Dryer ID Series

VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

LEY25: 200 mm or less LEY32: 100 mm or less 3 Rod ange is not available for the LEY25/32 with stroke 50 mm or less and motor option With lock. 4 Head ange is not available for the LEY32. Nil Ends tapped/ Body bottom tapped 2 L Foot F Rod ange 2 3 G Head ange 2 4 Applicable Stroke Table : Standard For auto switches, refer to page 507.

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140°F (60°C) (Max. ambient temperature: 113°F (45°C)

Heat exhausting direction Voltage Symbol Description Nil Heat exhaust from the rear 1 Heat exhaust from the right Note) Symbol Voltage 30 Three-phase 200 VAC (50 Hz) 200/220 VAC (60 Hz) 2 Heat exhaust from the left Note) 3 Heat exhaust from the top Note) Note) The combination of 1, 2 and 3 is not available. (Heat exhausting face can be specied on one side only.)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

(N) Backlash Manual release 12 16 20 40 Head end only 8 5, 10, 15, 20, 25, 30 125 211 53 82 329 29 12, 16 25, 50, 75, 100 1 mm Non-lock type only 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 Strokes other than the above are produced upon receipt of order. Theoretical Output (N) Stud Bolt Part No.

Series PPA PPA100/101/102 Compact Manometer 4

kPa 200 kPa Fluid Air, Non-corrosive gases Power supply 3 V (DC), Type AA dry cell x 2 pcs.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

SYJ300

DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Bracket Nil: Without bracket F: With bracket AC (50/60 Hz) 3 port 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available. Type of actuation Bracket 1 2 Normally closed Normally open (For manifold type 20, 20R) Bracket is mounted.

Clean Air Filter SFD Series

SFD100/200 AMG SFD200 only AFF Rc 1/4 NPT 1/4 G 1/4 Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40 How to Order Valve type 1 D G VCH4 1 06 Voltage N.C. 1 2 3 4 5 6 100 VAC 200 VAC Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) 110 VAC 220 VAC 1 24 VDC Port size 2(OUT) 1(IN) 12 VDC 06 10 3/4 Consult with SMC for other voltages. CE marking compliant products are only available with 50 VDC or less.

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

Normally open NBR FKM Pressure range 0 to 0.5 MPa Pressure range 0 to 1 MPa Pressure range 0 to 1.6 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T SGC200 SGC300 SGC400 o Electrical entry Y u Pilot valve W: M12 connector Note) T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) DO: DIN terminal without connector V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200

Coolant Valve Series SGH

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115