d

d

Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: B (Basic Type), Shaft Type: S (Single Shaft), Type: Standard, Size: 100, Rotating Angle: 180 (180°), Air Cushion: C (w/Air Cushion), Actuation Type: 2 (2 Position Double), Voltage: 5 (24 VDC), Electrical Entry: H (Grommet, Lead Wire 600mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual

Specification: C (Metric Specifications), Magnet: D (Built-in), Mounting: L (Foot Type), Shaft Type: S (Single Shaft), Type: Standard, Size: 100, Rotating Angle: 180 (180°), Air Cushion: C (w/Air Cushion), Actuation Type: 1 (2 Position Single), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override

d

d

d

Flow sensor

C: Revise contents partly several. D: Contents revised in several places. E: Contents revised in several places. [September 2016] F: Contents revised in several places.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity

SI unit (CC-Link compatible)

C: Limited warranty and Disclaimer are added. D: Modified errors in text. E: Contents are added. F: Contents are added. [July 2016] G: Contents revised in several places. [August 2019] H: Modified errors in text. [ November 2019] I: Contents revised in several places.

RS-232C-E

ITV2-OM00116 P R O D U C T N A M E E/P Regulator (For RS-232C) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-RC* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

In-line Air Filter

ZFC1 ZFC3 ZFC5 ZFC7 5 20 L/min 750 mm 2 7 100 L/min 1260 mm 1 2 2 3.2 3 4 4 6 5 8 6 10 7 12 Inch size A 1/8 B 5/32 D 1/4 E 5/16 F 3/8 7 - 2-2 Specifications Specifications Remarks Fluid Air, Nitrogen This product cannot be used in an environment exposed to chemicals. The maximum operating pressure varies depending on the temperature.

Stations: 08 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: T (Pressure Sensor, -100 to 100, Analog Output 1 to 5 V), Leadwire: Y (2m Switch/Sensor Only), Unit Options: E (Vacuum Break Flow Adjusting Needle, Screwdriver Operation Type Long Lock Nut), 1st Nominal Nozzle

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

VX31/32/33

Nil Z Nil T F N Rc NPTF G NPT Electrical entry (AC/DC) G -Grommet GS-With grommet surge voltage suppressor C -Conduit Rated voltage 6 7 8 J 1 2 3 4 5 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC T -With conduit terminal TS -With conduit terminal and surge voltage suppressor TL -With conduit terminal and

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Thread type Suffix Nil T F N Oil-free Rc NPTF G NPT Nil Z Electrical entry G -Grommet GS-With grommet surge voltage suppressor C-Conduit Select nil because the solenoid valve option V is the oil-free treatment.

Stations: 06 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection Supply Valve and Release

Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: K (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: K (Vacuum Break Flow Adjusting

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: T (Pressure Sensor, -100 to 100, Analog Output 1 to 5 V), Leadwire: Y (2m Switch/Sensor Only), Unit Options: J (Vacuum Break Flow Adjusting Needle, Round Lock Nut), 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection