Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N9 (5/16" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

VF1000-OMP0001

L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

(Only the auto switch mounting brackets are assembled before shipment.) * The D-Y59A, Y69A, Y7P, Y7lW, Z7l, Z80 cannot be mounted on the CP96 series.

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: R (External Pilot), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

D(mm): 9.53, Tube I.D. d(mm): 6.33, Maximum operating pressure(MPa): 1.5 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 10

D(mm): 12.7, Tube I.D. d(mm): 9.5, Maximum operating pressure(MPa): 1 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 10

Air cooled Thermo-con (Compact type)

INR-244-831 3-1 Communication Format 3.3 Composition of Required Message (from master to the product) Refer to page 3-4 3.5 Explanation of Code for codes 1 to 10.

XLJ- -*G1 Series 25 40

Construction and Outer dimensions 1 Atm , vent port Bonnet assembly (maintenance part) (inc. each part excluding body, external seal and accessory) Bonnet (material A6063) 6 External seal (maintenance part) 3 Vacuum pump side Valve seal (maintenance part) 2 Valve (material SUS304) 5 Body (material A6063) 4 Chamber side E C A A B D Dimensions [mm] Model A B C D E XLJ-25 50 139 111 48 44 (54

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.