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depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 Up to 300 301 to 1500 (mm) Female rod end With air cushion (mm) ZZ Stroke range ZZ Bore size Bore size GA RA S WA WH A1 MM H Rubber Air Standard Long 22 26 26 205 242 242 105

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing September, 2001 D-SMC.L.A. P-80 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Sensor -2kPa 0 2kPa 5kPa 10kPa Pressure range For low differential pressure PSE550 0 2kPa -0.2kPa 2kPa Rated differential pressure range of sensor Set differential pressure range of controller 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing July, 2003 D-YGA P-120 (YGA)

It may not be possible to connect the tubing, or leakage or disconnection may occur after connection. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Check Valve Series AK Large flow capacity Low cracking pressure: 0.02 MPa A wide variation of models Model Model Effective area (mm2) Port size Weight (g) 1 8 AK2000-01 25 105 1 4 AK2000-02 27.5 100 1 4 AK4000-02 47 155 3 8 AK4000-03 85 150 1 2 AK4000-04 95 140 3 4 AK6000-06 200 345 AK6000-10 230 315 1 Specifications AS Fluid Air Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa

MK2B25-10 10.5 80 M5x80l 50 MK2-F050 MK2B25-20 10.5 90 M5x90l 63 MK2-F063 MK2B32-10 10 90 M5x90l MK2B32-20 10 100 M5x100l MK2B40-10 6 80 M5x80l MK2B40-20 6 90 M5x90l MK2B50-20 10.5 105 M6x105l MK2B50-50 10.5 135 M6x135l MK2B63-20 9 105 M8x105l MK2B63-50 9 135 M8x135l Note: be sure to use a flat washer to mount cylinders via through holes.

CY Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa.

It is calculated using the following formula. 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105

of Greene, Tweed Technologies, Inc. 11 Aluminum High Vacuum Angle Valve XLF/XLFV Series Specifications Model XLF(V)-16-2 XLF(V)-25-2 XLF(V)-40-2 XLF(V)-50-2 XLF(V)-63-2 XLF(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLF 5 to 60 (High-temperature type: 5 to 150) XLFV 5 to 50 Operating pressure [Pa(abs)] 1 x 105

10.3.1 105 10.3.2 106 10.4 107 10.5 107 11 1-37 11.1 112 11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1

g 2 m: Approx. 165 g 3 m: Approx. 225 g 5 m: Approx. 345 g 10 m: Approx. 645 g 0.5 m: Approx. 75 g 1 m: Approx. 105 g 2 m: Approx. 165 g 3 m: Approx. 225 g 5 m: Approx. 345 g 10 m: Approx. 645 g Weight 224-1 A Communication Cable/Connector M12 Example of Connection PLC !

Instance attribute ID Access rule Description Value 100 Get SOLV Status 0: OK 1: Abnormal valve power supply voltage 101 Get SOLV Fuse Status 0: OK 1: Valve power supply fuse has blown 104 Get/Set Hold/Clear (Time Out) 0: DIP switch is valid (Initial value) 1: EEPROM valid 105 Get/Set Hold/Clear (Connection Delete) Setting 0: Fault action is valid (Initial value) 1: Clear 9-4.

clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 BB TX TZ Z FT FV FX FY FZ FD B CX L RR U Z CZ TDe8 15 10 15 224.5 80 100 9 71 16 299.5 29.5 85 117 12 60 42 76.5 30 10 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D18 12 15 81 38 95 127 248.5 70 90 50 110 9 12 19 328.5 12 88.5 35 + 0.070 0 + 0.3 + 0.1 0.032 0.059 25 16 18 148 263 11.5 101 352 49 110 15 86 105

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105

RUSSIA SMC Pneumatik LLC. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing April, 2003 D-DN P-120 (DN) Printed in Japan.

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

PLC (PLC) 15ms 30ms 8.7 ON SVRE ON SVON SVON ON SVRE ON 20 SVRE ON 105 No.SFOD-OMT0009CN-B USB USB USB USB USB JXC-W1 (JXC)=USB = (JXC)OFF (JXC-W1) (JXC)(PLC )( ) 15.2 () 7. 4. 2.3 5. 6.4 I/O 4. PLC (PLC) 15ms 30ms 8.7 () () 4.2.

AutomationEtherNet/IP TM RSLogix5000 TM Rockwell AutomationRSLogix5000 TM module][New Module] [I/O Configuration][EtherNet/IP [Select Module][ETHERNET-MODULE Generic Ethernet Module][Create] -36No.JXC-OMT0001CN-C [Module Properties] (1)Name (2)Comm FormatConnection Parameters (3)IP AddressIP AddressJXC93 (4)Assembly Instance Decimal Comm Format "Data-SINT" Input 100 Output 150 Configuration 105