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[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2018 SMC Corporation All Rights Reserved No.PS-OMH0006-F

No.PF-OMG0008-F PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF2A3## PF2W3## PF2D3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Wiring 16 Outline of setting 18 List of outputs 19 Initialize mode 20 Default settings

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 14 Revision 18-Aug-2020 Revision D Completely revised by format change.

Page Panel Mount Union Reducing LQ1P-R p. 5-11 Male Connector LQ1H-M p. 5-2 Female Connector LQ1H-F p. 5-2 Union Reducing LQ1U-R p. 5-11 Space Saving Union Elbow LQ1E-SS p. 5-12 Male Elbow LQ1L-M p. 5-3 Space Saving Union Elbow Reducing LQ1E-SS-R p. 5-12 Female Elbow LQ1L-F p. 5-3 Space Saving Union Tee LQ1T-S p. 5-13 Male Run Tee LQ1R-M p. 5-4 Space Saving Union Tee Reducing LQ1T-S-R p. 5-14

for a product with pressure gauge) Number of element 4 4 Note2) or 8 4 Note2) or 12 Element size (mm) note3) 65 to 70 250 65 to 70 500 (For 8 elements: 65 to 70 250) 65 to 70 750 (For 12 elements : 65 to 70 250) Element replacement differential pressure (MPa) 0.1 Cover SUS304 Case SUS304 Material O-ring FGES: NBR FGEL: FKM Leg SS400 Mass (kg) Body only 10 13 18 Internal capacity (L) 14

1 / 17 FGX-OM-F001-A PRODUCT NAME Return Filter MODEL / Series / Product Number FH100 Series FH100 X0 Series 2 / 17 FGX-OM-F001-A Contents Safety Instructions 1 1.How to Order 9 2.Construction and names of individual parts 10 3.Specifications 11 4.Installation and Piping 12 5.Maintenance 13 6.Maintenance parts 14 3 / / 17 FGX-OM-F001 FGX F001-A Return Filter Return Filter Return Filter Safety

Remove these factors. 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserve

D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0005-E Revision history A: Contents are added. B: Contents are added. C: Contents revised in several places. D: Contents revised in several places. E: Contents revised in several places.

No.PS-OMS0004CN-D // PSE570/573/574 2 8 9 10 10 14 15 15 17 -1No.PS-OMS0004CN-D (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

26 - Revision history AAll revised contents 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

GR-S-010(10g)GR-S-02020g 2. 3. 4. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 21 - 1. 2. 1. 2. 3. 1. 2. . 1. 2. 1. 2. 3. 1. 22 - 7. 6. 1 2A A 2B B 2C C 3 4 5 6 7 8 9 A 10 B 25 A 11 12 13 14 15 16 17 CDM2 23 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

MODEL / Series / Product Number IN574-95 (Speed + Cycle time + Count) Table of Contents Safety Instructions 2 Product Outline 5 Before use Model Indication and How to Order 6 Summary of Product parts 7 Wiring 9 Installing the batteries 9 Wiring 10 Operation details 12 Power ON12 Power OFF (Auto Power Off function) 12 Toggling the back light 12 Basic operation 13 Measurement mode change 14

If the products kinetic energy exceeds the allowable value, it could damage the product, and cause a hazard to humans and damage the machinery or equipment. (14) Do not stop or hold the product at midpoint by keeping air pressure in the product.

Description Material Note 1 Body Aluminum alloy Hard anodized 12 Stopper Resin 2 Adaptor Body Aluminum alloy Hard anodized 13 Back-up ring Stainless steel 14 Hexagon socket head bolt Stainless steel 3 Guide holder Stainless steel 4 Cam Steel Nitriding 15 Bearing High carbon chrome steel 5 Finger assy Stainless steel Heat treatment 6 Guide Stainless steel Heat treatment 16 Cylindrical roller

For finger part: MH-G01 (30 g) For cylinder part: GR-S-010 (10 g) 14 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Protection cover . 14 4-3. Mounting to duAro flange . 15 4-4. Angle Adjustment of the Moving Direction of the Finger . 16 4-5. Piping . 17 4-6. Speed controller . 17 4-7. Finger open / close speed adjustment . 18 4-8. Connection of the auto switch and sensor harness. 19 5. Operating method or operation . 19 5-1. Precautions for Design . 19 5-2. Air supply . 19 5-3.